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Femtosecond laser irradiation of titanium oxide thin films: accumulation effect under IR beam

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Abstract

This paper discusses the mechanisms of laser-induced periodic surface structures (LIPSS) formation using a high repetition rate femtosecond laser beam irradiation of magnetron-sputtered titanium oxide thin films (TiO1.8) grown onto SiO2/Si substrates. An Yb:YKW 500 fs linearly polarized laser emitting at a wavelength, λ, of 1030 nm, was used to irradiate the films (300 nm thickness) at a repetition rate of 100 kHz under both static and dynamic (scanning) conditions. Under static beam conditions, an incubation behavior related to materials in thin film form was established with a damage threshold of 72 mJ/cm2. Close to this fluence value and increasing the number of laser shots from 1 to 1000, micro-cracking occurred and propagated inside the beam waist diameter zone estimated close to 60 µm. In addition, using a higher fluence value of 280 mJ/cm2, i.e., well above the damage threshold, a melting occurred in an intermediate zone within the irradiated area, with a surprising ‘cure effect’ that contributes to the micro-cracks stabilization. Simultaneously, at the center of the Gaussian laser beam spot, the entire film ablation was observed. Furthermore, irradiation under dynamic mode with a scanning speed of 4 mm/s and a repetition rate of 100 kHz were achieved for the large-scale processing of the TiO1.8 films up to surface area of 25 × 25 mm2. For these irradiation conditions case that correspond to a fluence of 110 mJ/cm2 and a cumulative number of shots of 3000, 2D-LIPSS nano-cracks (200 nm length and λ/8 to λ/9 period) are obtained over the whole irradiated surface, a phenomenon that is mainly attributed to a thermo-mechanical ablation mechanism.

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Acknowledgements

The authors gratefully acknowledge the region ‘Centre-Val-de-Loire’ and the doctoral school ‘ED-EMSTU’ for supporting this work via the ‘PIA Tours 2015′ National Project, and the PhD students’ grants. MT would like to thank the ‘University of Orleans’ and the ‘SAFAR program’ for a fellowship held during the completion of this work.

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Authors and Affiliations

  1. GREMI, UMR 7344 CNRS / Université D’Orléans, 14 rue d’Issoudun, B.P. 6744, 45067, Orléans Cedex 2, France

    A. Talbi, N. Semmar, P. Coddet, A.-L. Thomann, A. Stolz, C. Leborgne & E. Millon

  2. Department of Physics, American University of Beirut, Bliss St, P.O. Box 11-0236, Riad el Solh, Beirut, 1107 2020, Lebanon

    M. Tabbal

  3. NCLA/Inspire Laboratories, School of Physics, National University of Ireland Galway, University Road, Galway, Ireland

    G. O.’ Connor

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Talbi, A., Semmar, N., Tabbal, M. et al. Femtosecond laser irradiation of titanium oxide thin films: accumulation effect under IR beam. Appl. Phys. A 126, 390 (2020). https://doi.org/10.1007/s00339-020-03568-5

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