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Pulse-by-pulse depth profile measurement of femtosecond laser ablation on copper

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Abstract

Pulse-by-pulse depth profile measurements were performed during femtosecond laser pulse irradiation on copper. The evolution of the ablation depth and the surface roughness during multi-pulse irradiation was investigated using a three-dimensional microscope. We found that a number of pulse irradiation was required to activate constant-rate ablation and the number of pulses depended on the fluence. We conclude that laser-induced embrittlement of a target material plays a decisive role to determine the ablation rate during multiple-pulse irradiation.

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Acknowledgements

A part of this research was supported by New Energy and Industrial Technology Development Organization (NEDO) and JSPS KAKENHI Grant number JP 17K14320.

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Authors and Affiliations

  1. Institute for Solid State Physics, The University of Tokyo, Kashiwa, Chiba, 277-8581, Japan

    Shuntaro Tani & Yohei Kobayashi

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  1. Shuntaro Tani
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  2. Yohei Kobayashi
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Correspondence to Shuntaro Tani.

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Tani, S., Kobayashi, Y. Pulse-by-pulse depth profile measurement of femtosecond laser ablation on copper. Appl. Phys. A 124, 265 (2018). https://doi.org/10.1007/s00339-018-1694-2

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