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Formation of microstructures on Ni film surface by nanosecond laser irradiation

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A Correction to this article was published on 09 April 2018

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Abstract

The formation of microstructures on a Ni film surface by nanosecond laser irradiation was investigated. The microstructures were formed by the interaction between the laser-induced plume and the film surface. The laser process was conducted in air and under slight vacuum pressure. The microstructures were formed around the laser-irradiated area and transitioned from a layer to flocculating structures upon repeated laser irradiation. The conifer-like structure was formed by scanning the laser. In addition, it was not formed under low pressure as a result of which the confinement effect of the plume was weak. Surface and cross-sectional observation suggested that the diffusion of nanoparticles on the film surface shaped the topography of the microstructure.

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  • 09 April 2018

    On the pages 2, 3 and 5 the values of the fluence (0.5 and 0.1 J/cm2) are incorrect. The correct values are 5 and 10 J/cm2.

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Authors and Affiliations

  1. Semiconductor Packaging Reserach and Development, DENSO Corporation, 1-1 Showa-cho, Kariya, Aichi, 448-8661, Japan

    Kazuki Koda, Wataru Kobayashi & Hirokazu Imai

  2. Department of Mechanical Engineering, Graduate School of Engineering, Osaka University, 1-1 Yamadaoka, Suita, Osaka, 565-0871, Japan

    Kazuki Koda

  3. Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki, Osaka, 567-0047, Japan

    Masahiro Tsukamoto

Authors
  1. Kazuki Koda
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  2. Wataru Kobayashi
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  3. Hirokazu Imai
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  4. Masahiro Tsukamoto
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Correspondence to Kazuki Koda.

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Koda, K., Kobayashi, W., Imai, H. et al. Formation of microstructures on Ni film surface by nanosecond laser irradiation. Appl. Phys. A 124, 227 (2018). https://doi.org/10.1007/s00339-018-1635-0

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  • DOI: https://doi.org/10.1007/s00339-018-1635-0

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