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Photonic jet: direct micro-peak machining

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Abstract

We report on the first evidence of direct micro-peak machining using a photonic jet (PJ) with nanosecond laser pulses. PJ is a high-concentrated propagative light beam with a full width at half maximum (FWHM) smaller than the diffraction limit. In our case, PJs are generated with a shaped optical fiber tip. Micro-peaks with a FWHM of around 1 \(\upmu\)m, a height until 590 nm and an apex radius of 14 nm, were repeatability achieved on a silicon wafer. The experiments have been carried out in ambient air using a 100/140 multimode silica fiber with a shaped tip along with a 35 kHz pulsed laser emitting 100 ns pulses at 1064 nm. This study shows that the phenomenon occurs only at low energies, just under the ablation threshold. Bulk material appears to have moved around to achieve the peaks in a self-organized process. We hypothesize that the matter was melted and not vaporized; hydrodynamic flow of molten material governed by surface-tension forces may be the causes. This surface modification has many applications. For example, this paper reports on the decrease of wettability of a textured silicon wafer.

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References

  1. A. Abdurrochman, S. Lecler, F. Mermet, B.Y. Tumbelaka, B. Serio, J. Fontaine, Appl. Opt. 53(31), 7202 (2014). doi:10.1364/AO.53.007202

    Article  ADS  Google Scholar 

  2. H.J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, J. Boneberg, J. Microsc. 202(1), 129 (2001). doi:10.1046/j.1365-2818.2001.00876.x

    Article  MathSciNet  Google Scholar 

  3. W. Wu, A. Katsnelson, O.G. Memis, H. Mohseni, Nanotechnology 18(48), 485302 (2007). doi:10.1088/0957-4484/18/48/485302

    Article  Google Scholar 

  4. W. Guo, Z.B. Wang, L. Li, D.J. Whitehead, B.S. Lukyanchuk, Z. Liu, Appl. Phys. Lett. 90(24), 243101 (2007). doi:10.1063/1.2748035

    Article  ADS  Google Scholar 

  5. D. Grojo, L. Charmasson, A. Pereira, M. Sentis, P. Delaporte, J. Nanosci. Nanotechnol. 11(10), 9129 (2011). doi:10.1166/jnn.2011.4295

    Article  Google Scholar 

  6. E. Mcleod, C.B. Arnold, Nat. Nanotechnol. 3(7), 413 (2008). doi:10.1038/nnano.2008.150

    Article  Google Scholar 

  7. J. Zelgowski, A. Abdurrochman, F. Mermet, P. Pfeiffer, J. Fontaine, S. Lecler, Opt. Lett. 41(9), 2073 (2016). doi:10.1364/OL.41.002073

    Article  ADS  Google Scholar 

  8. R. Pierron, S. Lecler, J. Zelgowski, P. Pfeiffer, F. Mermet, J. Fontaine, Appl. Surf. Sci. 418, Part B, 452 (2017). doi:10.1016/j.apsusc.2017.01.277

  9. R. Pierron, J. Zelgowski, P. Pfeiffer, J. Fontaine, S. Lecler, Opt. Lett. 42(14) (2017)

  10. Z. Chen, A. Taflove, V. Backman, Opt. Express 12(7), 1214 (2004). doi:10.1364/OPEX.12.001214

    Article  ADS  Google Scholar 

  11. S. Lecler, Y. Takakura, P. Meyrueis, Opt. Lett. 30(19), 2641 (2005). doi:10.1364/OL.30.002641

    Article  ADS  Google Scholar 

  12. A.V. Itagi, W.A. Challener, J. Opt. Soc. Am. A 22(12), 2847 (2005). doi:10.1364/JOSAA.22.002847

    Article  ADS  Google Scholar 

  13. X. Li, Z. Chen, A. Taflove, V. Backman, Opt. Express 13(2), 526 (2005). doi:10.1364/OPEX.13.000526

    Article  ADS  Google Scholar 

  14. A. Heifetz, S.C. Kong, A.V. Sahakian, A. Taflove, V. Backman, J. Comput. Theor. Nanosci. 6(9), 1979 (2009). doi:10.1166/jctn.2009.1254

    Article  Google Scholar 

  15. T.H. Her, R.J. Finlay, C. Wu, S. Deliwala, E. Mazur, Appl. Phys. Lett. 73(12), 1673 (1998). doi:10.1063/1.122241

    Article  ADS  Google Scholar 

  16. D.S. Ivanov, B. Rethfeld, G.M. O’Connor, T.J. Glynn, A.N. Volkov, L.V. Zhigilei, Appl. Phys. A 92(4), 791 (2008). doi:10.1007/s00339-008-4712-y

    Article  ADS  Google Scholar 

  17. A.I. Kuznetsov, J. Koch, B.N. Chichkov, Appl. Phys. A 94(2), 221 (2009). doi:10.1007/s00339-008-4859-6

    Article  ADS  Google Scholar 

  18. C. Unger, J. Koch, L. Overmeyer, B.N. Chichkov, Opt. Express 20(22), 24864 (2012). doi:10.1364/OE.20.024864

    Article  ADS  Google Scholar 

  19. J. Zhu, W. Li, M. Zhao, G. Yin, X. Chen, D. Chen, L. Zhao 5629, 276–283 (2005). doi:10.1117/12.571965

  20. A.I. Kuznetsov, C. Unger, J. Koch, B.N. Chichkov, Appl. Phys. A 106(3), 479 (2012). doi:10.1007/s00339-011-6747-8

    Article  ADS  Google Scholar 

  21. J.P. Moening, S.S. Thanawala, D.G. Georgiev, Appl. Phys. A 95(3), 635 (2009). doi:10.1007/s00339-009-5166-6

    Article  ADS  Google Scholar 

  22. J.P. Moening, D.G. Georgiev, J.G. Lawrence, J. Appl. Phys. 109(1), 014304 (2011). doi:10.1063/1.3524367

    Article  ADS  Google Scholar 

  23. C. Borsuk, Leslie M. (Los Alamitos. Alternating current arc for lensing system and method of using same (1988). http://www.freepatentsonline.com/4743283.html

  24. B.K. Nayak, P.O. Caffrey, C.R. Speck, M.C. Gupta, Appl. Surf. Sci. 266, 27 (2013). doi:10.1016/j.apsusc.2012.11.052

    Article  ADS  Google Scholar 

  25. C. Hairaye, F. Mermet, T. Engel, P.C. Montgomery, J. Fontaine, J. Phys. Conf. Ser. 558(1), 012063 (2014)

    Article  Google Scholar 

  26. T. Young, Philos. Trans. R. Soc. Lond. 95, 65 (1805). doi:10.1098/rstl.1805.0005

    Article  Google Scholar 

  27. R.N. Wenzel, Industrial & Engineering Chemistry 28(8), 988 (1936). doi:10.1021/ie50320a024

  28. A.B.D. Cassie, S. Baxter, Trans. Faraday Soc. 40, 546 (1944). doi:10.1039/TF9444000546

    Article  Google Scholar 

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Acknowledgements

The authors are grateful to Camille Hairaye (ICube Laboratory, France) for her technical assistance in the use of the characterization system of wettability.

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Authors and Affiliations

  1. ICube Laboratory, UMR 7357, University of Strasbourg-CNRS, 300 Boulevard Sébastien Brant, 67412, Illkirch, France

    Robin Pierron, Pierre Pfeiffer, Grégoire Chabrol & Sylvain Lecler

  2. ECAM Strasbourg-Europe, 2 Rue de Madrid, 67012, Schiltigheim, France

    Grégoire Chabrol

Authors
  1. Robin Pierron
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  2. Pierre Pfeiffer
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  3. Grégoire Chabrol
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  4. Sylvain Lecler
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Correspondence to Robin Pierron.

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Pierron, R., Pfeiffer, P., Chabrol, G. et al. Photonic jet: direct micro-peak machining. Appl. Phys. A 123, 686 (2017). https://doi.org/10.1007/s00339-017-1319-1

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