Abstract
Hybrid organic–inorganic integrated photonics integrate the organic material, as a part of active layer, with inorganic structure, and it is the organic component that extends the functionalities as compared to inorganic photonics. This paper presents the results of fabrication and characterization of inorganic and organic layers, as well as of hybrid organic–inorganic structures. Inorganic oxide and nitride materials and structures were grown using plasma enhanced chemical vapor deposition. As a substrate for tested organic layers and for preparation of multilayer structures, commercially available SiO2 created by thermal oxidation on Si was used. The hybrid organic–inorganic structures were prepared by spin coating of organic materials on SiO2/Si inorganic structures. As the basic photonics devices, the testing strip inorganic and organic waveguides were fabricated using reactive ion etching. The shape of fabricated testing waveguides was trapezoidal and etched structures were able to guide the radiation. The presented technology enabled to prepare hybrid organic–inorganic structures of comparable dimensions and shape. The fabricated waveguides dimensions and shape will be used for optimisation and design of new lithographic mask to prepare photonic components with required characteristics.
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References
J.-G. Liu, M. Ueda, High refractive index polymers: fundamental research and practical applications. J. Mater. Chem. 19, 8907–8919 (2009)
J. Luo, S. Huang, Z. Shi, B.M. Polishak, X.-H. Zhou, A.K. Jen, Tailored organic electro-optic materials and their hybrid systems for device applications. Chem. Mater. 23, 544–553 (2011)
R. Palmer, S. Koeber, D.L. Elder, M. Woessner, W. Heni, D. Korn, D. Lauermann, W. Bogaerts, L.R. Dalton, W. Freude, J. Leuthold, C. Koos, High-speed, low drive-voltage silicon-organic hybrid modulator based on a binary-chromophore electro-optic material. J. Lightwave Technol. 32, 2726–2734 (2014)
H. Ma, A.K.-Y. Jen, L.R. Dalton, Polymer-based optical waveguides: materials, processing, and devices. Adv. Mater. 14, 1339–1365 (2002)
J. Clark, G. Lanzani, Organic photonics for communications. Nat. Photonics 4. 438–446 (2010)
P. Písečný, J. Chlpík, J. Chovan, D. Haško, A. Vincze, P. Hronec, E. Dobročka, F. Uherek, Preparation and characterization of materials layers for photonic structures. in Proceedings of 1st International Conference on Advances in Electronic and Photonic Technologies (2013), pp. 258–261
S. Sujecki, Photonics modelling and design, Optical sciences and applications of light. (CRC Press, Boca Raton, 2014)
Basic PE CVD Plasma Processes, Oxford Instruments (2003), https://nanolab.berkeley.edu/process_manual/chap6/6.20PECVD.pdf. Accessed 24 Jun 2016
J. Chovan, P. Písečný, F. Uherek, D. Haško, M. Michalka, D. Seyringer, Design, fabrication and characterization of SiO x :N/SiO x optical waveguides. in Proceedings of 26th Conference Optical Communications 2014 (2014), pp. 11–15
Ferroelectric and piezoelectric copolymers, Piezotech (2010), http://www.piezotech.fr/fr/2-products-piezoelectric-polymers/news/news-32-p-vdf-trfe-ferrolelectric-&-piezoelectric-copolymers.html. Accessed 27 Jun 2016
J. Filo, R. Mišicák, M. Cigáň, M. Weis, J. Jakabovič, K. Gmucová, M. Pavúk, E. Dobročka, M. Putala, Oligothiophenes with the naphthalene core for organic thin-film transistors: variation in positions of bithiophenyl attachment to the naphthalene. Synth. Met. 202, 73–81 (2015)
I.M. Malovichko, Development and application of an AFM probe soft approach method. Bull. RAS Phys. 77, 969–971 (2013)
G.Z. Mashanovich, M. Milosevic, P. Matavulj, S. Stankovic, B. Timotijevic, P.Y. Yang, E.J. Teo, M.B.H. Breese, A.A. Bettiol, G.T. Reed, Silicon photonic waveguides for different wavelength regions. Semicond. Sci. Technol. 23, 064002 (2008)
F.G. Aras, E. Öz Orhan, O. Salihoglu, Benzocyclobutene (BCB 4022-35) single mode rib waveguides. Lect. Notes Photonic Optoelectron 1, 14–17 (2013)
X.C. Tong, Advanced materials for integrated optical waveguides, Springer series in advanced microelectronics 46 (Springer, Switzerland, 2014)
T. Barwicz, H.A. Haus, Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides. J. Lightwave Technol. 23, 2719–2732 (2005)
D.A. Turnbull, J.S. Sanghera, V.Q. Nguyen, I.D. Aggarwal, Photolithography fabrication of waveguides. Am. Ceram. Soc. Bull. 82, 9401–9406 (2003)
Acknowledgements
This work was financially supported by Scientific Grant Agency of the Ministry of Education, Science, Research and Sport of the Slovak Republic No. VEGA-1/0929/17 and by the Slovak Research and Development Agency under the Contract No. APVV-14-0716. We would like to thank Dr. P. Písečný for preparation of investigated sample structures and L. Bachárová, MD., DSc, MBA for valuable comments during writing the manuscript.
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Haško, D., Chovan, J. & Uherek, F. Fabrication and characterization of materials and structures for hybrid organic–inorganic photonics. Appl. Phys. A 123, 203 (2017). https://doi.org/10.1007/s00339-017-0858-9
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DOI: https://doi.org/10.1007/s00339-017-0858-9