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On-substrate fabrication of porous Al2O3 templates with tunable pore diameters and interpore distances

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Abstract

This work is focused on the on-substrate fabrication of porous aluminum oxide templates by anodization of a thin aluminum film deposited directly on the substrate using different concentrations of oxalic acid. These on-substrate templates are used for fabricating supported, free-standing nanorod (NR)-arrays by electrochemical deposition of Pt followed by the removal of the template. The interpore distance of the templates is tuned by varying the concentration of the electrolyte used for anodization and the applied voltage. The diameter of the pores (and thus the NRs of the resulting array) and wall thickness are influenced by modifying the pore opening time during immersion the sample in H3PO4.

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Authors and Affiliations

  1. Institute for Materials and Surface Technology, University of Applied Sciences, Grenzstr. 3, 24149, Kiel, Germany

    Nele Berger, Salah Habouti & Mohammed Es-Souni

  2. NanoSYD, Mads Clausen Institute, University of Southern Denmark, Alsion 2, 6400, Sønderborg, Denmark

    Horst-Günter Rubahn

Authors
  1. Nele Berger
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  2. Salah Habouti
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  3. Horst-Günter Rubahn
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  4. Mohammed Es-Souni
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Correspondence to Mohammed Es-Souni.

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Berger, N., Habouti, S., Rubahn, HG. et al. On-substrate fabrication of porous Al2O3 templates with tunable pore diameters and interpore distances. Appl. Phys. A 122, 192 (2016). https://doi.org/10.1007/s00339-016-9729-z

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  • DOI: https://doi.org/10.1007/s00339-016-9729-z

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