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Development of yttrium alloy ion source and its application in nanofabrication

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Abstract

We present a new YAuSi Liquid Metal Alloy Ion Source (LMAIS) generating focused ion beams of yttrium ions, and its prospective applications for nanofabrication, sample preparation, lithographic and implantation processes. Working parameters of the AuSiY LMAIS are similar to other gold-silicon based LMAIS. We found anomalously high emission current of triple charged yttrium ions. Influence of yttrium implantation on optical qualities of the implanted ion-ensembles is shown in luminescence of co-implanted Erbium ions.

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References

  1. T.M. Babinec, J.T. Choy, K.J.M. Smith, M. Khan, M. Lončar, Design and focused ion beam fabrication of single crystal diamond nanobeam cavities. J. Vac. Sci. Technol. B 29(010601), 1–6 (2010)

    Google Scholar 

  2. L. Bischoff, P. Mazarov, L. Bruchhaus, J. Gierak, Liquid metal alloy ion sources—an alternative for focussed ion beam technology. Appl. Phys. Rev. 3(2), 021101 (2016)

    Article  ADS  Google Scholar 

  3. T. Kornher, K. Xia, R. Kolesov, N. Kukharchyk, R. Reuter, P. Siyushev, R. Stöhr, M. Schreck, H.-W. Becker, B. Villa, A.D. Wieck, J. Wrachtrup, Production yield of rare-earth ions implanted into an optical crystal. Appl. Phys. Lett. 108(5), 053108 (2016)

    Article  ADS  Google Scholar 

  4. N. Kukharchyk, S. Shvarkov, S. Probst, K. Xia, H.-W. Becker, S. Pal, S. Markmann, R. Kolesov, P. Siyushev, J. Wrachtrup, A. Ludwig, A.V. Ustinov, A.D. Wieck, P. Bushev, Nanoscale nonlinear effects in Erbium-implanted Yttrium Orthosilicate. J. Lumin. 177, 266–274 (2016)

  5. F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, M. Spajer, Nanostructuring lithium niobate substrates by focused ion beam milling. Opt. Mater. 27(8), 1421–1425 (2005)

    Article  ADS  Google Scholar 

  6. M. Marinovi, R. Krsmanovi, D. Drami, I. Zekovi, Optical and thermal investigation of sol–gel derived Eu3+ : Y2SiO5 nanoparticles. Acta. Physica. Polonica. A. 112(5), 981–986 (2007)

  7. J. Meijer, T. Vogel, B. Burchard, I.W. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S.A. Schulz, K. Singer, F. Schmidt-Kaler, Concept of deterministic single ion doping with sub-nm spatial resolution. Appl. Phys. A Mater. Sci. Process. 83(2), 321–327 (2006)

    Article  ADS  Google Scholar 

  8. A. Melnikov, T. Gerya, M. Hillmann, I. Kamphausen, W. Oswald, P. Stauche, R. Wernhardt, A.D. Wieck, Development of an Au–Dy–Si liquid alloy ion source for focussed ion beam implantation. Nucl. Instrum. Methods Phys. Res. Sect. B Beam Interact. Mater. Atoms 195(3–4), 422–425 (2002)

    Article  ADS  Google Scholar 

  9. P.M. Nellen, V. Callegari, R. Brönnimann, FIB-milling of photonic structures and sputtering simulation. Microelectron. Eng. 83(4–9), 1805–1808 (2006)

    Article  Google Scholar 

  10. S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, J. Meijer, Creation efficiency of nitrogen-vacancy centres in diamond. New J. Phys. 12(6), 65017 (2010)

    Article  Google Scholar 

  11. P.D. Prewett, G.L.R. Mair, Focused ion beams from liquid metal ion sources/P.D. Prewett and G.L.R. Mair (Research Studies Press, Wiley, Taunton, New York, 1991)

    Google Scholar 

  12. S. Probst, N. Kukharchyk, H. Rotzinger, A. Tkalčec, S. Wünsch, A.D. Wieck, M. Siegel, A.V. Ustinov, P.A. Bushev, Hybrid quantum circuit with implanted erbium ions. Appl. Phys. Lett. 105(16), 2012–2017 (2014)

    Article  Google Scholar 

  13. P. Siyushev, K. Xia, R. Reuter, M. Jamali, N. Zhao, N. Yang, C. Duan, N. Kukharchyk, A.D. Wieck, R. Kolesov, J. Wrachtrup, Coherent properties of single rare-earth spin qubits. Nat. Commun. 5(22), 3895 (2014)

    ADS  Google Scholar 

  14. M. Sridhar, D.K. Maurya, J.R. Friend, L.Y. Yeo, Focused ion beam milling of microchannels in lithium niobate. Biomicrofluidics 6(1), 012819 (2012)

    Article  Google Scholar 

  15. N. Taghavinia, G. Lerondel, H. Makino, T. Yao, Europium-doped yttrium silicate nanoparticles embedded in a porous SiO2 matrix. Nanotechnology 15(11), 1549–1553 (2004)

    Article  ADS  Google Scholar 

  16. X.J. Wang, T. Nakajima, H. Isshiki, T. Kimura, Fabrication and characterization of Er silicates on SiO2 /Si substrates. Appl. Phys. Lett. 95(4), 3–5 (2009)

    Google Scholar 

  17. Y. Wang, F. Cheng, C. Li, Z. Tao, J. Chen, Preparation and characterization of nanocrystalline Mg2FeH6. J. Alloys Compd. 508(2), 554–558 (2010)

    Article  Google Scholar 

  18. A.D. Wieck, N. Kukharchyk, S. Pal, J. Rödiger, A. Ludwig, S. Probst, A.V. Ustinov, P. Bushev, Photoluminescence of focused ion beam implanted Er3+: Y2SiO5 crystals. Phys. Status Solidi Rapid Res. Lett. 8(10), 880–884 (2014)

    Article  ADS  Google Scholar 

  19. K. Xia, R. Kolesov, Y. Wang, P. Siyushev, R. Reuter, T. Kornher, N. Kukharchyk, A.D. Wieck, B. Villa, S. Yang, J. Wrachtrup, All-optical preparation of coherent dark states of a single rare earth ion spin in a crystal. Phys. Rev. Lett. 115(9), 1–5 (2015)

    Article  Google Scholar 

  20. T. Zhong, J.M. Kindem, E. Miyazono, A. Faraon, Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals. Nat. Commun. 6, 8206 (2015)

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Acknowledgements

Authors would like to thank Roman Kolesov, Kangwei Xia and Jörg Wrachtrup for the possibility of optical measurements.

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Author notes

  1. Nadezhda Kukharchyk

    Present address: Experimentalphysik, Universität des Saarlandes, 66123, Saarbrücken, Germany

Authors and Affiliations

  1. Angewandte Festkörperphysik, Ruhr-Universität Bochum, 44780, Bochum, Germany

    Nadezhda Kukharchyk, Ronna Neumann, Swetlana Mazarov & Andreas D. Wieck

  2. Experimentalphysik, Universität des Saarlandes, 66123, Saarbrücken, Germany

    Pavel Bushev

  3. Raith GmbH, Konrad-Adenauer-Allee 8, 44263, Dortmund, Germany

    Paul Mazarov

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  1. Nadezhda Kukharchyk
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  2. Ronna Neumann
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  3. Swetlana Mazarov
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  5. Andreas D. Wieck
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Correspondence to Nadezhda Kukharchyk.

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Kukharchyk, N., Neumann, R., Mazarov, S. et al. Development of yttrium alloy ion source and its application in nanofabrication. Appl. Phys. A 122, 1072 (2016). https://doi.org/10.1007/s00339-016-0607-5

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