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A novel NO2 gas sensor based on Hall effect operating at room temperature

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Abstract

Tungsten trioxide nanoparticles were obtained by a simple thermal oxidation approach. The structural and morphological properties of these nanoparticles are investigated using XRD, SEM and TEM. A WO3 thick film was deposited on the four Au electrodes to be a WO3 Hall effect sensor. The sensor was tested between magnetic field in a plastic test chamber. Room-temperature nitrogen dioxide sensing characteristics of Hall effect sensor were studied for various concentration levels of nitrogen dioxide at dry air and humidity conditions. A typical room-temperature response of 3.27 was achieved at 40 ppm of NO2 with a response and recovery times of 36 and 45 s, respectively. NO2 gas sensing mechanism of Hall effect sensor was also studied. The room-temperature operation, with the low deposition cost of the sensor, suggests suitability for developing a low-power cost-effective nitrogen dioxide sensor.

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Acknowledgments

This work was supported by the Natural Science Foundation of China (Grant No. 61306071) and the Natural Science Foundation of Fujian Province, China (Grant No. 2015J05117).

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Correspondence to J. Y. Lin.

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Lin, J.Y., Xie, W.M., He, X.L. et al. A novel NO2 gas sensor based on Hall effect operating at room temperature. Appl. Phys. A 122, 801 (2016). https://doi.org/10.1007/s00339-016-0330-2

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  • DOI: https://doi.org/10.1007/s00339-016-0330-2

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