Abstract
We attempt to integrate light-emitting diode (LED) and waveguide on the same GaN-on-silicon platform, which is fashioned with suspended p–n junction InGaN/GaN multiple quantum wells. Silicon substrate is removed to form highly confined waveguide structures and suspended LED. The light emission measurements experimentally demonstrate that part of the LED emission is coupled into suspended waveguide. The light is then guided in the waveguide and propagates along the waveguide structure, and is finally diffracted into the air at the waveguide output facet. The light spectra captured by a micro-transmittance setup confirm that the lateral light propagation inside the waveguide is electrically driven and power-dependent. These results indicate that the proposed integrated device is promising for the monolithic integration of LED with waveguide and photodetector toward next-generation photonic chips based on the GaN-on-silicon platform.
Similar content being viewed by others
References
M.D. Brubaker, P.T. Blanchard, J.B. Schlager, A.W. Sanders, A. Roshko, S.M. Du, J.M. Gray, V.M. Bright, N.A. Sanford, K.A. Bertness, On-chip optical interconnects made with gallium nitride nanowires. Nano Lett. 13, 374–377 (2013)
M. Tchernycheva, A. Messanvi, A. de Luna Bugallo, G. Jacopin, P. Lavenus, L. Rigutti, H. Zhang, Y. Halioua, F.H. Julien, J. Eymery, C. Durand, Integrated photonic platform based on InGaN/GaN nanowire emitters and detectors. Nano Lett. 14, 3515–3520 (2014)
Y.S. No, J.H. Choi, H.S. Ee, M.S. Hwang, K.Y. Jeong, E.K. Lee, M.K. Seo, S.H. Kwon, H.G. Park, A double-strip plasmonic waveguide coupled to an electrically driven nanowire LED. Nano Lett. 13, 772–776 (2013)
R. Hui, S. Taherion, Y. Wan, J. Li, S.X. Jin, J.Y. Lin, H.X. Jiang, GaN-based waveguide devices for long-wavelength optical communications. Appl. Phys. Lett. 82, 1326 (2003)
U. Dharanipathy, N. Vico Triviño, C. Yan, Z. Diao, J.-F. Carlin, N. Grandjean, R. Houdré, Near-infrared characterization of gallium nitride photonic-crystal waveguides and cavities. Opt. Lett. 37, 4588–4590 (2012)
I.-W. Feng, W.P. Zhao, J. Li, J.Y. Lin, H.X. Jiang, J. Zavada, Correlation between the optical loss and crystalline quality in erbium-doped GaN optical waveguides. Appl. Opt. 52, 5426–5429 (2013)
M. Gromovyi, F. Semond, J.Y. Duboz, G. Feuillet, M.P. Demicheli, Low loss GaN waveguides for visible light on Si substrates. J. Eur. Opt. Soc. 9, 14050 (2014)
D. Bai, T. Wu, X. Li, X. Gao, Y. Xu, Z. Cao, H. Zhu, Y. Wang, Suspended GaN-based nanostructure for integrated optics. Appl. Phys. B Lasers Opt. 122, 1–7 (2016)
H.L. Minh, D. O’Brien, G. Faulkner, L. Zeng, K. Lee, D. Jung, Y.J. Oh, E.T. Won, 100-Mb/s NRZ visible light communications using a postequalized white LED. IEEE Photonics Technol. Lett. 21, 1063–1065 (2009)
C.-L. Liao, C.-L. Ho, Y.-F. Chang, C.-H. Wu, M.-C. Wu, High-speed light-emitting diodes emitting at 500 nm with 463-MHz modulation bandwidth. IEEE Electron. Devices Lett. 35, 563–565 (2014)
S. Noda, M. Fujita, Photonic crystal efficiency boost. Nat. Photonics 3, 129–130 (2009)
X.H. Zhang, Y.F. Cheung, Y.Y. Zhang, H.W. Choi, Whispering-gallery mode lasing from optically free-standing InGaN microdisks. Opt. Lett. 39, 5614–5617 (2014)
Y. Wang, J. Chen, Z. Shi, S. He, M.L. Garcia, L. Chen, N.A. Hueting, C. Martin, M. Zhang, H. Zhu, Suspended membrane GaN gratings for refractive index sensing. Appl. Phys. Express 7, 052201 (2014)
Z. Shi, X. Li, G. Zhu, Z. Wang, P. Grünberg, H. Zhu, Y. Wang, Characteristics of GaN-based LED fabricated on a GaN-on-silicon platform. Appl. Phys. Express 7, 082102 (2014)
Y.J. Wang, T. Sasaki, T. Wu, F.R. Hu, K. Hane, Comb-drive GaN micro mirror on a GaN-on-silicon platform. J. Micromech. Microeng. 21, 035012 (2011)
K. Chung, C.H. Lee, G.C. Yi, Transferable GaN layers grown on ZnO-coated grapheme layers for optoelectronic devices. Science 330, 655–657 (2010)
Y.W. Cheng, S.C. Wang, Y.F. Yin, L.Y. Su, J. Huang, GaN-based LEDs surrounded with a two-dimensional nanohole photonic crystal structure for effective laterally guided mode coupling. Opt. Lett. 36, 1611–1613 (2011)
Z. Shi, X. Li, X.J. Fang, X.M. Huang, H.B. Zhu, Y.J. Wang, Experimental observation of lateral emission in freestanding GaN-based membrane devices. Opt. Lett. 39, 4931–4933 (2014)
M. Kushimoto, T. Tanikawa, Y. Honda, H. Amano, Optically pumped lasing properties of (1\(\bar 1\)01) InGaN/GaN stripe multiquantum wellswith ridge cavity structure on patterned (001) Si substrates. Appl. Phys. Express 8, 022702 (2015)
J.J. Wierer Jr, A. David, M.M. Megens, III-nitride photonic-crystal light-emitting diodes with high extraction efficiency. Nat. Photonics 3, 163–169 (2009)
X. Li, Z. Shi, G. Zhu, M. Zhang, H. Zhu, Y. Wang, High efficiency membrane light emitting diode fabricated by back wafer thinning technique. Appl. Phys. Lett. 105, 031109 (2014)
Y. Zhang, L. McKnight, E. Engin, I.M. Watson, M.J. Cryan, E. Gu, M.G. Thompson, S. Calvez, J.L. O’Brien, M.D. Dawson, GaN directional couplers for integrated quantum photonics. Appl. Phys. Lett. 99, 161119 (2011)
O. Westreich, M. Katz, Y. Paltiel, O. Ternyak, N. Sicron, Low propagation loss in GaN/AlGaN-based ridge waveguide. Phys. Status Solidi A 212, 1043–1048 (2015)
Acknowledgments
This work is jointly supported by NSFC (61322112, 61531166004), research project (2014CB360507, RLD201204, BJ211026).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bai, D., Gao, X., Cai, W. et al. Fabrication of suspended light-emitting diode and waveguide on a single chip. Appl. Phys. A 122, 535 (2016). https://doi.org/10.1007/s00339-016-0075-y
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00339-016-0075-y