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Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

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Abstract

This paper reports an arbitrary-shape designable fabrication of three-dimensional (3D) micro-Rogowski coil inside silica glass by means of femtosecond laser wet etches and metal microsolidics. The dimension of the fabricated micro-Rogowski coil is 800 μm, and the aspect ratio of the structure reaches about 300. The alloys of Bi/In/Sn/Pb with high melting point were used as the conductive metal. The inductance of micro-Rogowski coil is 113.58 nH at 10 kHz and 14.11 nH at 120 MHz, respectively. The embedded 3D micro-Rogowski coils can be easily integrated with other microelectrical, mechanical and optical systems, which could be widely applied in MEMS, sensors and lab-on-chips.

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Acknowledgments

This work is supported by the National Science Foundation of China under the Grant Nos. 51335008, 61275008 and 61176113, the Special-funded program on National Key Scientific Instruments and Equipment Development of China under the Grant No. 2012YQ12004706.

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Authors and Affiliations

  1. State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University, No 28 Xianning West Road, Xi’an, 710049, People’s Republic of China

    Xiangwei Meng, Qing Yang, Feng Chen, Chao Shan, Keyin Liu & Xun Hou

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  1. Xiangwei Meng
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  2. Qing Yang
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  3. Feng Chen
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  4. Chao Shan
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Correspondence to Feng Chen.

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Meng, X., Yang, Q., Chen, F. et al. Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining. Appl. Phys. A 120, 669–674 (2015). https://doi.org/10.1007/s00339-015-9236-7

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  • DOI: https://doi.org/10.1007/s00339-015-9236-7

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