Skip to main content
SpringerLink
Log in

Ablation of metal thin films using femtosecond laser Bessel vortex beams

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Femtosecond lasers can provide submicron ablation resolution, making them suitable and attractive for various micro/nanofabrication applications. Laser beam shaping lends further advantages and increases the versatility of these sources. In this work, we report on the use of femtosecond laser pulses with first-order Bessel function (Bessel vortex) beam profiles in ablation of metal thin films. The diffraction-free nature of Bessel beams provides significant convenience regarding alignment and repeatability. Ablation profiles with Bessel vortex beams generally consist of single or multiple concentric rings, determined by pulse fluence on target. We investigate single-pulse ablation behavior with two laser wavelengths (1,030 and 515 nm) and three different Bessel beam cone angles. For each case, we measure inner and outer ring diameters and compare our results with theoretical calculations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. R.R. Gattass, E. Mazur, Nat. Photonics 2(4), 219 (2008). doi:10.1038/nphoton.2008.47

    Article  ADS  Google Scholar 

  2. S.I. Kudryashov, G. Mourou, A. Joglekar, J.F. Herbstman, A.J. Hunt, Appl. Phys. Lett. 91(14), 141111 (2007). doi:10.1063/1.2790741

    Article  ADS  Google Scholar 

  3. A. Joglekar, H. Liu, G. Spooner, E. Meyhfer, G. Mourou, A. Hunt, Appl. Phys. B 77(1), 25 (2003). doi:10.1007/s00340-003-1246-z

    Article  Google Scholar 

  4. A.P. Joglekar, H.h. Liu, E. Meyhfer, G. Mourou, A.J. Hunt, Proc. Nat. Acad. Sci. USA 101(16), 5856 (2004). doi:10.1073/pnas.0307470101. http://www.pnas.org/content/101/16/5856.abstract

  5. B. Yalizay, T. Ersoy, B. Soylu, S. Akturk, Appl. Phys. Lett. 100(3), 031104 (2012). doi:10.1063/1.3678030

    Article  ADS  Google Scholar 

  6. F. Courvoisier, P.A. Lacourt, M. Jacquot, M.K. Bhuyan, L. Furfaro, J.M. Dudley, Opt. Lett. 34(20), 3163 (2009). doi:10.1364/OL.34.003163. http://ol.osa.org/abstract.cfm?URI=ol-34-20-3163

  7. J. Durnin, J.H. Eberly, J.J. Miceli, Opt. Lett. 13(2), 79 (1988). doi:10.1364/OL.13.000079. http://ol.osa.org/abstract.cfm?URI=ol-13-2-79

  8. F. Courvoisier, J. Zhang, M. Bhuyan, M. Jacquot, J. Dudley, Appl. Phys. A 112(1), 29 (2013). doi:10.1007/s00339-012-7201-2

    Article  Google Scholar 

  9. R. Sahin, Y. Morova, E. Simsek, S. Akturk, Appl. Phys. Lett. 102(19), 193106 (2013). doi:10.1063/1.4805358

    Article  ADS  Google Scholar 

  10. R. Sahin, E. Simsek, S. Akturk, Appl. Phys. Lett. 104(5), 053118 (2014). doi:10.1063/1.4864616

    Article  ADS  Google Scholar 

  11. B. Wetzel, C. Xie, P.A. Lacourt, J.M. Dudley, F. Courvoisier, Appl. Phys. Lett. 103(24), 241111 (2013). doi:10.1063/1.4846415

    Article  ADS  Google Scholar 

  12. J. Nye, M. Berry, Proc. R. Soc. Lond. Ser. A Math. Phys. Eng. Sci. 336(1605), 165 (1974). doi:10.1098/rspa.1974.0012

    Article  ADS  MathSciNet  MATH  Google Scholar 

  13. N.R. Heckenberg, R. McDuff, C.P. Smith, A.G. White, Opt. Lett. 17(3), 221 (1992). doi:10.1364/OL.17.000221. http://ol.osa.org/abstract.cfm?URI=ol-17-3-221

  14. M. Beijersbergen, L. Allen, H. van der Veen, J. Woerdman, Opt. Commun. 96(13), 123 (1993). doi:10.1016/0030-4018(93)90535-D

    Article  ADS  Google Scholar 

  15. S. Khonina, V. Kotlyar, M. Shinkaryev, V. Soifer, G. Uspleniev, J. Mod. Opt. 39(5), 1147 (1992). doi:10.1080/09500349214551151

    Article  ADS  Google Scholar 

  16. M. Beijersbergen, R. Coerwinkel, M. Kristensen, J. Woerdman, Opt. Commun. 112(56), 321 (1994). doi:10.1016/0030-4018(94)90638-6

    Article  ADS  Google Scholar 

  17. D. Grier, Nature 424(6950), 810 (2003). doi:10.1038/nature01935

    Article  ADS  Google Scholar 

  18. C. Hnatovsky, V.G. Shvedov, W. Krolikowski, A.V. Rode, Opt. Lett. 35(20), 3417 (2010). doi:10.1364/OL.35.003417. http://ol.osa.org/abstract.cfm?URI=ol-35-20-3417

  19. C. Hnatovsky, V.G. Shvedov, N. Shostka, A.V. Rode, W. Krolikowski, Opt. Lett. 37(2), 226 (2012). doi:10.1364/OL.37.000226. http://ol.osa.org/abstract.cfm?URI=ol-37-2-226

  20. J. Arlt, K. Dholakia, Opt. Commun. 177(16), 297 (2000). doi:10.1016/S0030-4018(00)00572-1

    Article  ADS  Google Scholar 

  21. J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, B. Chichkov, Appl. Phys. A Mater. Sci. Process 81(2), 325 (2005). doi:10.1007/s00339-005-3212-6

    Article  ADS  Google Scholar 

  22. J.M. Steele, Z. Liu, Y. Wang, X. Zhang, Opt. Express 14(12), 5664 (2006). doi:10.1364/OE.14.005664. http://www.opticsexpress.org/abstract.cfm?URI=oe-14-12-5664

  23. M.C. Gwinner, E. Koroknay, L. Fu, P. Patoka, W. Kandulski, M. Giersig, H. Giessen, Small 5(3), 400 (2009). doi:10.1002/smll.200800923

    Article  Google Scholar 

  24. B. Lahiri, S.G. McMeekin, R.M. De La Rue, N.P. Johnson, Appl. Phys. Lett. 98(15) (2011). doi:10.1063/1.3579537

  25. H.M. Gong, L. Zhou, X.R. Su, S. Xioo, S.D. Liu, Q.Q. Wang, Adv. Funct. Mater. 19(2), 298 (2009). doi:10.1002/adfm.200801151

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by Turkish Academy of Sciences (TUBA GEBIP). We also would like to thank Dr. Baris Yagci, Dr. Ozgur Birer from Koc University and Dr. Ali Kilic from Istanbul Technical University for SEM studies. R. Sahin also thanks TUBITAK for Ph.D. scholarship.

Author information

Authors and Affiliations

  1. Department of Physics Engineering, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey

    Ramazan Sahin, Tansu Ersoy & Selcuk Akturk

Authors
  1. Ramazan Sahin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tansu Ersoy
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Selcuk Akturk
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ramazan Sahin.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Sahin, R., Ersoy, T. & Akturk, S. Ablation of metal thin films using femtosecond laser Bessel vortex beams. Appl. Phys. A 118, 125–129 (2015). https://doi.org/10.1007/s00339-014-8808-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-014-8808-2

Keywords

Search

Navigation