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Temperature dependence of the optical properties of ion-beam sputtered ZrN films

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Abstract

The reflectivity of sputtered Zirconium nitride films on glass substrate has been investigated in the spectral energy range of 0.8–6.1 eV as a function of deposition temperature varying between 373 and 723 K. Optical constants of the prepared films have been determined using the Drude analysis. Experimental results showed strong dependency of optical properties of the films, such as optical resistivity on the substrate temperature. The temperature increase of the substrate has shown an increase in both the plasmon frequency and electron scattering time. The electrical behavior of the films showed a good agreement between their optical and electrical resistivity.

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Authors and Affiliations

  1. Radiation Applications Research School, NSTRI, AEOI, Karaj, Iran

    M. M. Larijani & E. Jafari-Khamse

  2. Department of Physics, Azad University, South Tehran Branch, Tehran, Iran

    M. Kiani

  3. Department of Physics, University of Kashan, Kashan, Iran

    E. Jafari-Khamse

  4. Nuclear Science Research School, NSTRI, Tehran, Iran

    V. Fathollahi

Authors
  1. M. M. Larijani
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  2. M. Kiani
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  3. E. Jafari-Khamse
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  4. V. Fathollahi
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Correspondence to M. M. Larijani.

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Larijani, M.M., Kiani, M., Jafari-Khamse, E. et al. Temperature dependence of the optical properties of ion-beam sputtered ZrN films. Appl. Phys. A 117, 1179–1183 (2014). https://doi.org/10.1007/s00339-014-8495-z

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  • DOI: https://doi.org/10.1007/s00339-014-8495-z

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