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Dual metamaterial structures generated from an one-step fabrication using stencil lithography

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Abstract

The flexibility to deposit metallic structures on any substrates without the need of lift-off or etching process are the main reasons for the recent popularity of using stencil lithography for plasmonic applications. In this work, we fabricate nanoholes on a Si3N4 membrane and deposit metal–dielectric layers and such approach allows us to have a perforated fishnet metamaterial structure on the membrane as well as its complementary pillar structure on a quartz substrate. We then studied and compared their optical properties from both experiment and simulation results.

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Acknowledgments

This work was financially supported by Agency for Science, Technology and Research (A*STAR), under the Grant No. 0921540099 and 0921540098.

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Authors and Affiliations

  1. Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), 3 Research Link, Singapore, 117602, Singapore

    Eunice S. P. Leong, J. Deng, Y. J. Liu & J. H. Teng

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  1. Eunice S. P. Leong
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  2. J. Deng
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  3. Y. J. Liu
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  4. J. H. Teng
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Correspondence to Eunice S. P. Leong or J. H. Teng.

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Leong, E.S.P., Deng, J., Liu, Y.J. et al. Dual metamaterial structures generated from an one-step fabrication using stencil lithography. Appl. Phys. A 116, 907–912 (2014). https://doi.org/10.1007/s00339-014-8461-9

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  • DOI: https://doi.org/10.1007/s00339-014-8461-9

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