Skip to main content
SpringerLink
Log in

The new way of controlling aluminum-doped zinc oxide films properties: ion beam post-treatment with cooling system

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet resistance at the same time was proposed. The more exciting find of this paper is that, compared to the samples without cooling during the process of the ion beam post-treatment, samples with proper cooling voltage show a sheet resistance decrease of 26 % (from 11.9 Ω/□ to 8.8 Ω/□) and a roughness decrease of 35.5 % (from 13.389 nm to 8.637 nm) without transparency losing. And the viewpoint that substrate cooling has the effect of weakening the crystallization, especially for the subface and internal parts of samples is deduced.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  1. Y.-Y. Chen, P.W. Wang, J.-C. Hsu, C.-Y. Lee, Vacuum 87, 1 (2013)

    Article  Google Scholar 

  2. J.W. Leem, Y.M. Song, J.S. Yu, Opt. Express 19, S5 (2011)

    Article  Google Scholar 

  3. S.L. Ou, D.S. Wuu, S.P. Liu, Y.C. Fu, S.C. Huang, R.H. Horng, Opt. Express 19, 17 (2011)

    Article  Google Scholar 

  4. K. Nakamura, Y. Ishikawa, K. Utsumi, H. Ligusa, R. Tanaka, Y. Ishizaki, T. Yamamoto, A. Maekawa, M. Owari, M. Nojima, Y. Nihei, Surf. Interface Anal. 38, 12–13 (2006)

    Article  Google Scholar 

  5. L.M. Wong, S.J. Wang, W.K. Chim, Thin Solid Films 518, 24 (2009)

    Google Scholar 

  6. D. Inamdar, C. Agashe, P. Kadam, S. Mahamuni, Thin Solid Films 520, 11 (2012)

    Google Scholar 

  7. R. Hong, J. Huang, H. He, Z. Fan, J. Shao, Appl. Surf. Sci. 242, 3–4 (2005)

    Article  Google Scholar 

  8. D. Zhang, J. Shao, D. Zhang, S. Fan, T. Tan, Z. Fan, Opt. Lett. 29, 24 (2004)

    Google Scholar 

  9. F. Frost, R. Fechner, B. Diberi, A. Schindler, Thin Solid Films 459, 1–2 (2004)

    Article  Google Scholar 

  10. S. Flickyngerova, M. Netrvalovab, L. Prusakovab, I. Novotnya, P. Suttab, V. Tvarozeka, Vacuum 84, 1 (2010)

    Google Scholar 

Download references

Acknowledgements

This work is partly supported by National Natural Science Foundation of China (61176085), National Key Technologies R&D Program (2011BAF02B04), National Science Instrument Important Project (2011YQ15004003, 2011YQ14014704), the program (11DZ2290301) from Shanghai Committee of Science & Technology, the Leading Academic Discipline Project of Shanghai Municipal Government (S30502), and the Innovation Fund Project for the Graduate Student of Shanghai (JWCXSL1022).

Author information

Authors and Affiliations

  1. Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, No. 516 JunGong Road, Shanghai, 200093, China

    Zhengji Ni, Dawei Zhang & Wenna Wang

  2. School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798, Singapore

    Dawei Zhang & DaoHua Zhang

  3. Shanghai Publishing and Printing College, Shanghai, 200093, China

    Haojie Sun

  4. Northwestern Polytechnical University, Xian, 710072, China

    Ting Mei

Authors
  1. Zhengji Ni
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dawei Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Haojie Sun
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Wenna Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. DaoHua Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Ting Mei
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dawei Zhang.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ni, Z., Zhang, D., Sun, H. et al. The new way of controlling aluminum-doped zinc oxide films properties: ion beam post-treatment with cooling system. Appl. Phys. A 112, 569–573 (2013). https://doi.org/10.1007/s00339-013-7803-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-013-7803-3

Keywords

Search

Navigation