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Selective gold film removal from multi-layer substrates with nanosecond UV pulsed laser ablation

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Abstract

Pulsed UV laser ablation was explored as a means of removing thin (200 nm) gold films from one side of a transparent, thin (50 μm) quartz substrate. Single-pulse laser ablation (KrF excimer laser, 248 nm) was used to remove a top gold film without damaging the pre-patterned gold electrode deposited on the opposite side of the quartz substrate. Scanning electron microscope images were taken to evaluate the quality and consistency of the metal removal. It was found that the ablation threshold is 160 mJ/cm2 for 5 ns pulses. The highest-quality single-pulse ablation was observed with 200 mJ/cm2 for 5 ns pulses, and significant shielding was observed for fluences up to six times the ablation threshold for both 5 and 15 ns pulse durations. Further, the impact of increasing pulse energies upon the bottom electrode was measured, and a progression from pinhole formation to simultaneous removal of both gold films as a function of pulse intensity was determined.

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Acknowledgements

We gratefully acknowledge funding to establish the Photon Factory from MIRE at The University of Auckland. We also thank Rakon Limited in Auckland, New Zealand for providing samples.

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Authors and Affiliations

  1. The Photon Factory, The University of Auckland, Auckland, New Zealand

    Charles A. Rohde, Hayley Ware, Fraser MacMillan & M. Cather Simpson

  2. The School of Chemical Sciences and the Department of Physics, The University of Auckland, Auckland, New Zealand

    Charles A. Rohde & M. Cather Simpson

  3. Rakon Limited, 8 Sylvia Park Road, Auckland, 1060, New Zealand

    Malkhaz Meladze

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  1. Charles A. Rohde
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  2. Hayley Ware
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  3. Fraser MacMillan
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Correspondence to M. Cather Simpson.

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Rohde, C.A., Ware, H., MacMillan, F. et al. Selective gold film removal from multi-layer substrates with nanosecond UV pulsed laser ablation. Appl. Phys. A 111, 531–537 (2013). https://doi.org/10.1007/s00339-013-7617-3

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  • DOI: https://doi.org/10.1007/s00339-013-7617-3

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