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X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers

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Abstract

We present a comparative study of B4C/Mo and B4C/Mo2C periodic multilayer structures deposited by magnetron sputtering. The characterization was performed by grazing incidence X-ray reflectometry at two different energies and high resolution transmission electron microscopy. The experimental results indicate the existence of an interdiffusion layer at the B4C-on-Mo interface in the B4C/Mo system. Thus, the B4C/Mo multilayers were modeled by an asymmetric structure with three layers in each period. The thickness of B4C-on-Mo interfacial layer was estimated about 1.1 nm. The B4C/Mo2C multilayers present less interdiffusion and are well modeled by a symmetric structure without interfacial layers. This study shows that B4C/Mo2C structure is an interesting alternative to B4C/Mo multilayer for X-ray optic applications.

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Acknowledgements

This work is supported by a grant from the RTRA (réseaux thématiques de recherche avancée) program “Triangle de la Physique”. The deposition and the characterization of the multilayers were performed on CEMOX (Centrale d’Elaboration et de Métrologie d’Optique X), a platform of LUMAT federation (CNRS FR2764). The authors would like to thank Karine Rousseau from SERMA TECHNOLOGIES for performing HTEM investigation.

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  1. F. Choueikani

    Present address: Synchrotron SOLEIL, L’Orme des Merisiers, Saint-Aubin, BP48, 91192, Gif-sur-Yvette, France

Authors and Affiliations

  1. Laboratoire Charles Fabry, Institut d’Optique, CNRS, Univ Paris Sud, 2 avenue Augustin Fresnel, 91127, Palaiseau Cedex, France

    F. Choueikani, F. Bridou, E. Meltchakov & F. Delmotte

  2. Synchrotron SOLEIL, L’Orme des Merisiers, Saint-Aubin, BP48, 91192, Gif-sur-Yvette, France

    B. Lagarde, F. Polack & P. Mercere

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  1. F. Choueikani
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Correspondence to F. Choueikani.

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Choueikani, F., Bridou, F., Lagarde, B. et al. X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers. Appl. Phys. A 111, 191–198 (2013). https://doi.org/10.1007/s00339-013-7560-3

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