Abstract
An 880-nm Ti:sapphire laser is used to induce ripple structures on silicon substrates. Single-oriented ripples, twice-overlapped/interlaced single-oriented ripples and single/double-oriented ripples with lattice structures have been obtained at five scan modes. The ripples may be formed by an intensity modulation which arises from the interference of the incident laser and the surface plasmon polaritons excited by the scattered wave of laser. The lattice structures are believed to be formed by intersecting truncation of two mutually perpendicular ripples. All the ripples are oriented in the direction perpendicular to the laser polarization vector and with a period smaller than the laser wavelength.
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M. Birnbaum, Semiconductor surface damage produced by ruby laser. J. Appl. Phys. 36, 3688 (1965)
D.C. Emmony, R.P. Howson, L.J. Willis, Laser mirror damage in germanium at 10.6 μm. Appl. Phys. Lett. 23, 598 (1973)
P.M. Fauchet, A.E. Sigman, Surface ripples on silicon and gallium arsenide under picosecond pulse illumination. Appl. Phys. Lett. 40, 824 (1982)
A. Borowieca, H.K. Haugen, Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl. Phys. Lett. 82, 4462 (2003)
H. Yonekubo, K. Katayama, T. Aawada, Formation of a ripple pattern at a water/silicon interface using an oscillating bubble. Appl. Phys. A 81, 843 (2005)
J. Bonsea, M. Munz, H. Sturm, Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses. J. Appl. Phys. 97, 013538 (2005)
V.I. Emel’yanov, Self-organization of ordered nano- and microstructures on the semiconductor surface under the action of laser radiation. Laser Phys. 18, 682 (2008)
J.M. Li, J.T. Xu, The evolution of a microstructure on Si by a femtosecond laser. Laser Phys. 18, 1539 (2008)
J.M. Li, J.T. Xu, Self-organized nanostructure by a femtosecond laser on silicon. Laser Phys. 19, 121 (2009)
J.F. Young, J.E. Sipe, J.S. Preston, H.M. van Driel, Laser induced periodic surface damage and radiation remnants. Appl. Phys. Lett. 41, 261 (1982)
J.F. Young, J.S. Preston, H.M. van Driel, J.E. Sipe, Laser induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass. Phys. Rev. B 27, 1155 (1983)
J.C. Wang, C.L. Guo, Ultrafast dynamics of femtosecond laser-induced periodic surface pattern formation on metals. Appl. Phys. Lett. 87, 251914 (2005)
M. Tsukamoto, K. Asuka, H. Nakano, M. Hashida, M. Katto, N. Abe, M. Fujita, Periodic microstructures produced by femtosecond laser irradiation on titanium plate. Vacuum 80, 1346 (2006)
M.S. Rafique, M. Khaleeq-Ur-Rahman, T. Firdos, K. Aslam, M.S. Anwar, M. Imran, H. Latif, XRD and SEM analysis of a laser-irradiated cadmium. Laser Phys. 17, 1138 (2007)
Y. Yang, J.J. Yang, L. Xue, Y. Guo, Surface patterning on periodicity of femtosecond laser-induced ripples. Appl. Phys. Lett. 97, 141101 (2010)
E.E.B. Campbell, D. Ashkenasi, A. Rosenfeld, Ultra-short-pulse laser irradiation and ablation of dielectrics. Mater. Sci. Forum 301, 123 (1999)
R. Ranjan, D.N. Lambeth, M. Tromel, P. Goglia, Y. Li, Laser texturing for low-flying-height media. J. Appl. Phys. 69, 5745 (1991)
H. Hiraoka, M. Sendova, Laser-induced sub-half-micrometer periodic structure on polymer surfaces. Appl. Phys. Lett. 64, 563 (1994)
K. Serna, C.N. Afonso, A.K. Petford-Long, N.J. Long, Structural ripple formation in Ge/Sb multilayers induced by laser irradiation. Appl. Phys. A 58, 197 (1994)
A.V. Demchuk, V.A. Labunov, Surface morphology and structure modification of silicon layers induced by nanosecond laser radiation. Appl. Surf. Sci. 86, 353 (1995)
D.Q. Yuan, M. Zhou, L. Cai, Femtosecond laser micromachining of an Au/Cr film nanostack. Laser Phys. 18, 1092 (2008)
S. Petrovic, B. Gakovic, D. Perusko, T. Desai, D. Batani, M. Cekada, B. Radak, M. Trtica, Picosecond laser ablation of nano-sized WTi thin film. Laser Phys. 19, 1844 (2009)
V.I. Emel’yanov, D.M. Seval’nev, Defect-deformational Kuramoto–Sivashinsky equation and formation of surface nano- and microstructures under the laser and ion-beam irradiation. Laser Phys. 21, 566 (2011)
F. Keilmann, Y.H. Bai, Periodic surface structures frozen into CO2 laser melted quartz. Appl. Phys. A 29, 9 (1982)
Y.F. Lu, J.J. Yu, W.K. Choi, Theoretical analysis of laser induced periodic structures at silicon-dioxide/silicon and silicon and silicon-dioxide/aluminum interfaces. Appl. Phys. Lett. 71, 3439 (1997)
N. Baltzer, M. von Allmen, M.W. Sigrist, Acoustic signal from laser-annealed amorphous silicon. Appl. Phys. Lett. 43, 826 (1983)
S. Sakabe, M. Hashida, S. Tokita, S. Namba, K. Okamuro, Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse. Phys. Rev. B 79, 033409 (2009)
K. Okamuro, M. Hashida, Y. Miyasaka, Y. Ikuta, S. Tokita, S. Sakabe, Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation. Phys. Rev. B 82, 165417 (2010)
A.M. Bonch-Bruevich, M.N. Libenson, V.S. Makin, V.V. Trubaev, Surface electromagnetic-waves in optics. Opt. Eng. 31, 718 (1992)
M.F. Chen, K. Lin, Y.S. Ho, Effects of laser-induced recovery process on conductive property of SnO2:F thin films. Mater. Sci. Eng. B 176, 127 (2011)
Acknowledgements
This work is supported by Jiangsu Province Research Innovation Program of College Graduate (Grant No. CX08B_053Z), A Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions, National Key Basic Research Development Program of China (973 Program, Grant No. 2011CB013004) and the National Natural Science Foundation of China (Grant No. 50975129).
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Li, B.J., Zhou, M. & Wu, B. Periodic ripple structures on silicon substrates induced by femtosecond laser at various scan modes. Appl. Phys. A 112, 993–998 (2013). https://doi.org/10.1007/s00339-012-7460-y
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DOI: https://doi.org/10.1007/s00339-012-7460-y