Skip to main content
SpringerLink
Log in

Room-temperature pulsed laser deposition and dielectric properties of amorphous Bi3.95Er0.05Ti3O12 thin films on conductive substrates

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Bi3.95Er0.05Ti3O12 (BErT) thin films were prepared on Pt/Ti/SiO2/Si and indium-tin-oxide (ITO)-coated glass substrates at room temperature by pulsed laser deposition. These thin films were amorphous with uniform thickness. Excellent dielectric characteristics have been confirmed. The amorphous BErT thin films deposited on the Pt/Ti/SiO2/Si and ITO-coated glass substrates exhibited almost the same dielectric constant of 52 with a low dielectric loss of less than 0.02 at 1 kHz. Meanwhile, the dielectric properties of the thin films had an excellent bias voltage stability and thermal stability. The amorphous BErT thin films might have potential applications in microelectronic and optoelectronic devices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  1. B.H. Park, B.S. Kang, S.D. Bu, T.W. Noh, J. Lee, W. Jo, Nature 401, 682 (1999)

    Article  ADS  Google Scholar 

  2. D.H. Bao, T.W. Chiu, N. Wakiya, K. Shinozaki, N. Mizutani, J. Appl. Phys. 93, 497 (2003)

    Article  ADS  Google Scholar 

  3. S.K. Lee, D. Hesse, U. Goesele, Appl. Phys. Lett. 88, 062909 (2006)

    Article  ADS  Google Scholar 

  4. H. Zhou, G.H. Wu, N. Qin, D.H. Bao, J. Am. Ceram. Soc. 93, 2109 (2010)

    Article  Google Scholar 

  5. S.N. Song, J.W. Zhai, X. Yao, J. Electroceram. 21, 649 (2008)

    Article  Google Scholar 

  6. J.H. Hao, Z. Luo, J. Gao, J. Appl. Phys. 100, 114107 (2006)

    Article  ADS  Google Scholar 

  7. Z.J. Wang, J.R. Chu, R. Maeda, H. Kokawa, Thin Solid Films 416, 66 (2002)

    Article  ADS  Google Scholar 

  8. T.K. Kang, C.T. Chang, C.L. Lin, W.F. Wu, Microelectron. Eng. 86, 1994 (2009)

    Article  Google Scholar 

  9. K.K. Banger, Y. Yamashita, K. Mori, R.L. Peterson, T. Leedham, J. Rickard, H. Sirringhaus, Nat. Mater. 10, 45 (2011)

    Article  ADS  Google Scholar 

  10. B.N. Pal, B.M. Dhar, K.C. See, H.E. Katz, Nat. Mater. 8, 898 (2009)

    Article  ADS  Google Scholar 

  11. J. Zhu, Z.G. Liu, Mater. Lett. 57, 4297 (2003)

    Article  Google Scholar 

  12. W. Wang, G.F. Dong, L.D. Wang, Y. Qiu, Microelectron. Eng. 85, 414 (2008)

    Article  Google Scholar 

  13. X.H. Zhang, W. Ren, P. Shi, M.S. Khan, X.F. Chen, X.Q. Wu, X. Yao, J. Alloys Compd. 509, 9302 (2011)

    Article  Google Scholar 

  14. J.H. Park, W.S. Lee, N.J. Seong, S.G. Yoon, Appl. Phys. Lett. 88, 192902 (2006)

    Article  ADS  Google Scholar 

  15. J.H. Park, C.J. Xian, N.J. Seong, S.G. Yoon, Appl. Phys. Lett. 89, 232910 (2006)

    Article  ADS  Google Scholar 

  16. Z. Mo, G.H. Wu, D.H. Bao, Appl. Surf. Sci. 258, 5323 (2012)

    Article  ADS  Google Scholar 

  17. F. Gao, G.J. Ding, H. Zhou, G.H. Wu, N. Qin, D.H. Bao, J. Appl. Phys. 109, 043106 (2011)

    Article  ADS  Google Scholar 

  18. F. Gao, G.H. Wu, H. Zhou, D.H. Bao, J. Appl. Phys. 106, 126104 (2009)

    Article  ADS  Google Scholar 

  19. E. Downing, L. Hesselink, J. Ralston, R. Macfarlane, Science 273, 1185 (1996)

    Article  ADS  Google Scholar 

  20. S. Sheng, X.Y. Zhang, P. Wang, C.K. Ong, Thin Solid Films 518, 2864 (2010)

    Article  ADS  Google Scholar 

  21. D.J. Kim, Mater. Sci. Eng. B 141, 87 (2007)

    Article  Google Scholar 

  22. N. Zhong, T. Shiosaki, J. Appl. Phys. 100, 034107 (2006)

    Article  ADS  Google Scholar 

  23. C. Gao, J. Yang, X.J. Meng, T. Lin, J.H. Ma, J.L. Sun, J.H. Chu, Appl. Phys. A 104, 123 (2011)

    Article  ADS  Google Scholar 

  24. T. Sareein, M. Unruan, A. Ngamiarurojana, S. Jiansirisomboon, A. Watcharapasorn, R. Yimnirun, Phys. Lett. A 373, 1583 (2009)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

The authors gratefully acknowledge financial support from Natural Science Foundation of China (No. 51172289), Natural Science Foundation of Guangdong Province, China (No. 10251027501000007), and the Specialized Research Fund for the Doctoral Program of Higher Education of China (No. 20110171130004).

Author information

Authors and Affiliations

  1. State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics and Engineering, Sun Yat-Sen University, Guangzhou, 510275, China

    Zhong Mo, Lirong Liang, Baojun Li & Dinghua Bao

  2. College of Materials Science and Engineering, South China University of Technology, Guangzhou, 510640, China

    Xinrui Miao & Wenli Deng

Authors
  1. Zhong Mo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xinrui Miao
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Lirong Liang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Wenli Deng
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Baojun Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Dinghua Bao
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dinghua Bao.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Mo, Z., Miao, X., Liang, L. et al. Room-temperature pulsed laser deposition and dielectric properties of amorphous Bi3.95Er0.05Ti3O12 thin films on conductive substrates. Appl. Phys. A 111, 1113–1117 (2013). https://doi.org/10.1007/s00339-012-7326-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-012-7326-3

Keywords

Search

Navigation