Abstract
Wavelength dispersion of a computer-generated hologram causes spatial broadening of the focal spot in holographic femtosecond laser processing. From the paraxial approximation, we theoretically derived that the spatial broadening is proportional to only the diffraction position, defined as the distance from the optical axis. We performed experiments under the large-dispersion condition to analyze the influence of the diffraction position on the processed structure. In the processing experiment, a high-numerical-aperture lens and a laser energy near the threshold energy were used to fabricate sub-microstructures. We found a nonlinear dependence of the broadening of the processed structures on the diffraction position, and the degree of broadening was much smaller than the predicted value because of the nonlinear properties of the laser processing.
Similar content being viewed by others
References
D. Du, X. Liu, G. Korn, G. Mourou, Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs. Appl. Phys. Lett. 64, 3071–3073 (1994)
H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm. Appl. Phys. Lett. 65, 1850–1852 (1994)
B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tünnermann, Femtosecond, picosecond and nanosecond laser ablation of solids. Appl. Phys. A 63, 109–115 (1996)
K.M. Davis, K. Miura, N. Sugimoto, K. Hirao, Writing waveguides in glass with a femtosecond laser. Opt. Lett. 21, 1729–1731 (1996)
E.N. Glezer, M. Milosavljevic, L. Huang, R.J. Finlay, T.-H. Her, J.P. Callan, E. Mazur, Three-dimensional optical storage inside transparent materials. Opt. Lett. 21, 2023–2025 (1996)
K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, H. Hosono, Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses. Appl. Phys. B 71, 119–121 (2000)
T. Kondo, S. Matsuo, S. Juodkazis, H. Misawa, Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals. Appl. Phys. Lett. 79, 725–727 (2001)
Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, Y. Jiang, Holographic fabrication of multiple layers of grating inside soda-lime glass with femtosecond laser pulses. Appl. Phys. Lett. 80, 1508–1510 (2002)
K. Venkatakrishnan, N.R. Sivakumar, C.W. Hee, B. Tan, W.L. Liang, G.K. Gan, Direct fabrication of surface-relief grating by interferometric technique using femtosecond laser. Appl. Phys. A 77, 959–963 (2003)
Y. Nakata, T. Okada, M. Maeda, Nano-sized hollow bump array generated by single femtosecond laser pulse. Jpn. J. Appl. Phys. 42, L1452–L1454 (2003)
S. Matsuo, S. Juodkazis, H. Misawa, Femtosecond laser microfabrication of periodic structures using a microlens array. Appl. Phys. A 80, 683–685 (2005)
J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, S. Kawata, Multi-spot parallel processing for micronanofabrication. Appl. Phys. Lett. 86, 044102 (2005)
J. Amako, K. Nagasaka, N. Kazuhiro, Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements. Opt. Lett. 27, 969–971 (2002)
Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, K. Hirao, Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements. Opt. Express 12, 1908–1915 (2004)
Y. Hayasaki, T. Sugimoto, A. Takita, N. Nishida, Variable holographic femtosecond laser processing by use of a spatial light modulator. Appl. Phys. Lett. 87, 031101 (2005)
N. Sanner, N. Huot, E. Audouard, C. Larat, J.P. Huignard, B. Loiseaux, Programmable focal spot shaping of amplified femtosecond laser pulses. Opt. Lett. 30, 1479–1481 (2005)
S. Hasegawa, Y. Hayasaki, N. Nishida, Holographic femtosecond laser processing with multiplexed phase Fresnel lenses. Opt. Lett. 31, 1705–1707 (2006)
G.J. Lee, Y.P. Lee, H. Cheong, C.S. Yoon, C.H. Oh, E.K. Kim, Y.-D. Son, J. Jang, Femtosecond-laser surface structuring of amorphous and crystalline silicon. J. Korean Phys. Soc. 48, 1268–1272 (2006)
S. Hasegawa, Y. Hayasaki, Holographic femtosecond laser processing with multiplexed phase Fresnel lenses displayed on the liquid crystal spatial light modulator. Opt. Rev. 14, 208–213 (2007)
H. Takahashi, S. Hasegawa, Y. Hayasaki, Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator. Appl. Opt. 46, 5917–5923 (2007)
K. Chaen, H. Takahashi, S. Hasegawa, Y. Hayasaki, Display method with compensation of the spatial frequency response of a liquid crystal spatial light modulator for holographic femtosecond laser processing. Opt. Commun. 280, 165–172 (2007)
M. Yamaji, H. Kawashima, J. Suzuki, S. Tanaka, Three dimensional micromachining inside a transparent material by single pulse femtosecond laser through a hologram. Appl. Phys. Lett. 93, 041116 (2008)
Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. Edwardson, M. Padgett, G. Dearden, K. Watkins, High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator. Appl. Surf. Sci. 255, 2284–2289 (2008)
S. Hasegawa, Y. Hayasaki, Adaptive optimization of hologram in holographic femtosecond laser processing system. Opt. Lett. 34, 22–24 (2009)
S. Hasegawa, Y. Hayasaki, Performance analysis of adaptive optimization of multiplexed phase Fresnel lenses. Jpn. J. Appl. Phys. 48, 09LE03 (2009)
Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, K. Watkins, Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring. Appl. Surf. Sci. 255, 6582–6588 (2009)
P.S. Salter, M.J. Booth, Addressable microlens array for parallel laser microfabrication. Opt. Lett. 36, 2302–2304 (2011)
A. Jesacher, M.J. Booth, Parallel direct laser writing in three dimensions with spatially dependent aberration correction. Opt. Express 18, 21090–21099 (2010)
S. Hasegawa, Y. Hayasaki, Second harmonic optimization of computer-generated hologram. Opt. Lett. 36, 2943–2945 (2011)
M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, K. Hirao, Improved phase hologram design for generating symmetric light spots and its application for laser writing of waveguides. Opt. Lett. 36, 1065–1067 (2011)
Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, S. Hasegawa, Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing. Appl. Phys. A 107, 357–362 (2012)
L. Kelemen, S. Valkai, P. Ormos, Parallel photopolymerisation with complex light patterns generated by diffractive optical elements. Opt. Express 15, 14488–14497 (2007)
H. Takahashi, S. Hasegawa, A. Takita, Y. Hayasaki, Sparse-exposure technique in holographic two-photon polymerization. Opt. Express 16, 16592–16599 (2008)
N.J. Jenness, R.T. Hill, A. Hucknall, A. Chilkoti, R.L. Clark, A versatile diffractive maskless lithography for single-shot and serial microfabrication. Opt. Express 18, 11754–11762 (2010)
K. Obata, J. Koch, U. Hinze, B.N. Chichkov, Multi-focus two-photon polymerization technique based on individually controlled phase modulation. Opt. Express 18, 17193–17200 (2010)
S.D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R.J. Narayan, B.N. Chichkov, Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator. Biomed. Opt. Express 2, 3167–3178 (2011)
M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, K. Hirao, Parallel drawing of multiple bent optical waveguides by using a spatial light modulator. Jpn. J. Appl. Phys. 48, 126507–126511 (2009)
M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, K. Hirao, Fabrication of three-dimensional 1×4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam. Opt. Express 18, 12136–12143 (2010)
D. Liu, Z. Kuang, W. Perrie, P.J. Scully, A. Baum, S.P. Edwardson, E. Fearon, G. Dearden, K.G. Watkins, High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings. Appl. Phys. B 101, 817–823 (2010)
H. Imamoto, S. Kanehira, X. Wang, K. Kametani, M. Sakakura, Y. Shimotsuma, K. Miura, K. Hirao, Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser. Opt. Lett. 36, 1176–1178 (2011)
M. Antkowiak, M.L. Torres-Mapa, F. Gunn-Moore, K. Dholakia, Application of dynamic diffractive optics for enhanced femtosecond laser based cell transfection. J. Biophotonics 3, 696–705 (2010)
G. Mínguez-Vega, J. Lancis, J. Caraquitena, V. Torres-Company, P. Andrés, High spatiotemporal resolution in multifocal processing with femtosecond laser pulses. Opt. Lett. 31, 2631–2633 (2006)
G. Mínguez-Vega, E. Tajahuerce, M. Fernández-Alonso, V. Climent, J. Lancis, J. Caraquitena, P. Andrés, Dispersion-compensated beam-splitting of femtosecond light pulses: wave optics analysis. Opt. Express 15, 278–288 (2007)
L. Martínez-León, P. Clemente, E. Tajahuerce, G. Mínguez-Vega, O. Mendoza-Yero, M. Fernández-Alonso, J. Lancis, V. Climent, P. Andrés, Spatial-chirp compensation in dynamical holograms reconstructed with ultrafast lasers. Appl. Phys. Lett. 94, 011104 (2009)
G. Zhu, J. van Howe, M. Durst, W. Zipfel, C. Xu, Simultaneous spatial and temporal focusing of femtosecond pulses. Opt. Express 13, 2153–2159 (2005)
D. Oron, E. Tal, Y. Silberberg, Scanningless depth-resolved microscopy. Opt. Express 13, 1468–1476 (2005)
E. Tal, D. Oron, Y. Silberberg, Improved depth resolution in video-rate line-scanning multiphoton microscopy using temporal focusing. Opt. Lett. 30, 1686–1688 (2005)
D. Oron, Y. Silberberg, Spatiotemporal coherent control using shaped, temporally focused pulses. Opt. Express 13, 9903–9908 (2005)
M.E. Durst, G. Zhu, C. Xu, Simultaneous spatial and temporal focusing for axial scanning. Opt. Express 14, 12243–12254 (2006)
K. Kimura, S. Hasegawa, Y. Hayasaki, Diffractive spatiotemporal lens with wavelength dispersion compensation. Opt. Lett. 35, 139–141 (2010)
J. Bengtsson, Kinoform design with an optimal-rotation-angle method. Appl. Opt. 33, 6879–6884 (1994)
Acknowledgements
This work was supported by a Grant-in-Aid for Scientific Research (B) from the Ministry of Education, Culture, Sports, Science, and Technology of Japan.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hasegawa, S., Hayasaki, Y. Nonlinear sharpening of holographically processed sub-microstructures. Appl. Phys. A 111, 929–934 (2013). https://doi.org/10.1007/s00339-012-7317-4
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-012-7317-4