Skip to main content
SpringerLink
Log in

Synthesis and characterization of Ti–Ni shape memory alloy thin films by pulsed laser deposition

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Shape-memory alloys are crucial in various industrial fields. However, a high-quality film synthesis method has not been established yet. Here we examine optimum conditions for synthesis of thin films by pulsed laser deposition of Ti–Ni alloy target in vacuum. We investigated surface morphologies and chemical compositions of the films which were obtained under various conditions. We found that the suitable Ti/Ni ratio was obtained by adjusting the distance between the target and the substrate in vacuum. In parallel, we analyzed plasma plume by optical emission spectroscopy and time-of-flight mass spectrometry. We discuss the basic behavior of ablated particles in vacuum.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. M. Kohl, D. Dittmann, E. Quandt, B. Winzek, S. Miyazaki, D.M. Allen, Mater. Sci. Eng. A 273–275, 784–788 (1999)

    Google Scholar 

  2. A. Ishida, M. Saito, Thin Solid Films 516, 7836–7839 (2008)

    Article  ADS  Google Scholar 

  3. K. Shibagaki, T. Kawashima, K. Sasaki, K. Kadota, Jpn. J. Appl. Phys. 39, 4959–4963 (2000)

    Article  ADS  Google Scholar 

  4. V.C. Dinca, S. Soare, A. Barbalat, C.Z. Dinu, A. Moldovan, I. Stoica, T. Vassu, A. Purice, N. Scarisoareanu, R. Birjega, V. Cracium, V. Ferrari DeStefanco, M. Dinescu, Appl. Surf. Sci. 252, 4619–4624 (2006)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, Suzuka National College of Technology, Shiroko-cho, Suzuka, Mie, 510-0294, Japan

    Kanji Shibagaki, Kota Kawano & Atsuto Mori

Authors
  1. Kanji Shibagaki
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kota Kawano
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Atsuto Mori
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Kanji Shibagaki.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shibagaki, K., Kawano, K. & Mori, A. Synthesis and characterization of Ti–Ni shape memory alloy thin films by pulsed laser deposition. Appl. Phys. A 110, 805–808 (2013). https://doi.org/10.1007/s00339-012-7156-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-012-7156-3

Keywords

Search

Navigation