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Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam

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Abstract

To study the interactions between picosecond soft x-ray laser (SXRL) beams and material surfaces, gold (Au), copper (Cu), and silicon (Si) surfaces were irradiated with SXRL pulses having a wavelength of 13.9 nm and a duration of ∼7 ps. Following irradiation, the surfaces of the substrates were observed using a scanning electron microscope and an atomic force microscope. With single pulse irradiation, ripple-like structures were formed on the Au and Cu surfaces. These structures were different from previously investigated conical structures formed on an Al surface. In addition, it was confirmed that the development of modified structures, i.e., growth of hillocks on the Au and Cu surfaces, was observed after multiple SXRL pulse exposures. However, on the Si surface, deep holes that seemed to be melted structures induced by the accumulation of multiple pulses of irradiations were found. Therefore, it was concluded that SXRL beam irradiation of various material surfaces causes different types of surface modifications, and the changes in the surface behaviors are attributed to the differences in the elemental properties, such as the attenuation length of x-ray photons.

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References

  1. S. Eliezer, N. Eliaz, E. Grossman, D. Fisher, I. Gouzman, Z. Henis, S. Pecker, Y. Horovitz, M. Fraenkel, S. Maman, Y. Lereah, Synthesis of nanoparticles with femtosecond laser pulses. Phys. Rev. B 69, 144119 (2004)

    Article  ADS  Google Scholar 

  2. S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitiello, X. Wang, Femtosecond laser pulse irradiation of solid targets as a general route to nanoparticle formation in a vacuum. Phys. Rev. B 71, 033406 (2005)

    Article  ADS  Google Scholar 

  3. J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, B.N. Chichkov, Nanotexturing of gold films by femtosecond laser-induced melt dynamics. Appl. Phys. A 81, 325–328 (2005)

    Article  ADS  Google Scholar 

  4. N. Bityurin, Studies on laser ablation of polymers. Annu. Rep. Prog. Chem., Sect. C: Phys. Chem. 101, 216–247 (2005)

    Article  Google Scholar 

  5. D.J. Hwang, M. Kim, K. Hiromatsu, H. Jeon, C.P. Grigoropoulos, Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing. Appl. Phys. A 96, 385–390 (2009)

    Article  ADS  Google Scholar 

  6. T. Jiang, J. Koch, C. Unger, E. Fadeeva, A. Koroleva, Q. Zhao, B.N. Chichkov, Ultrashort picosecond laser processing of micro-molds for fabricating plastic parts with superhydrophobic surface. Appl. Phys. A 108, 863–869 (2012). doi:10.1007/s00339-012-6985-4

    Article  ADS  Google Scholar 

  7. P. Gibbon, E. Förster, Short-pulse laser-plasma interactions. Plasma Phys. Control. Fusion 38, 769–793 (1996)

    Article  ADS  Google Scholar 

  8. M. Tanaka, M. Nishikino, T. Kawachi, N. Hasegawa, M. Kado, M. Kishimoto, K. Nagashima, Y. Kato, X-ray laser beam with diffraction-limited divergence generated with two gain media. Opt. Lett. 28, 1680–1682 (2003)

    Article  ADS  Google Scholar 

  9. M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukagawa, Y. Ochi, N. Hasegawa, Y. Kato, Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence. Phys. Rev. A 68, 061802(R) (2003)

    Article  ADS  Google Scholar 

  10. Y. Ochi, T. Kawachi, N. Hasegawa, A. Sasaki, K. Nagashima, K. Sukegawa, M. Kishimoto, M. Tanaka, M. Nishikino, M. Kado, Measurement of temporal durations of transient collisional excitation x-ray laser. Appl. Phys. B 78, 961–963 (2004)

    Article  ADS  Google Scholar 

  11. A.Ya. Faenov, Y. Kato, M. Tanaka, T.A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S.V. Bulanov, T. Kawachi, Submicrometer-resolution in situ imaging of the focus pattern of a soft x-ray laser by color center formation in LiF crystal. Opt. Lett. 34, 941–943 (2009)

    Article  ADS  Google Scholar 

  12. A.Ya. Faenov, N.A. Inogamov, V.V. Zhakhovskii, V.A. Khokhlov, K. Nishihara, Y. Kato, M. Tanaka, T.A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, T. Nakamura, Y. Fukuda, S.V. Bulanov, T. Kawachi, Low-threshold ablation of dielectrics irradiated by picosecond soft x-ray laser pulses. Appl. Phys. Lett. 94, 231107 (2009)

    Article  ADS  Google Scholar 

  13. N.A. Inogamov, A.Ya. Faenov, V.A. Khokhlov, V.V. Zhakhovskii, Yu.V. Petrov, I.Yu. Skobelev, K. Nishihara, Y. Kato, M. Tanaka, T.A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S.V. Bulanov, T. Kawachi, S.I. Anisimov, V.E. Fortov, Spallative ablation of metals and dielectrics. Contrib. Plasma Phys. 49, 455–466 (2009)

    Article  Google Scholar 

  14. N.A. Inogamov, V.V. Zhakhovskii, A.Ya. Faenov, V.V. Shepelev, I.Y. Skobelev, V.A. Khokhlov, Y. Kato, M. Tanaka, T.A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S.V. Bulanov, T. Kawachi, Y.V. Petrov, S.I. Anisimov, V.E. Fortov, Spallative ablation of dielectrics by soft x-ray laser. Appl. Phys. A 101, 87–96 (2010)

    Article  ADS  Google Scholar 

  15. M. Ishino, A.Ya. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T.A. Pikuz, N.A. Inogamov, V.V. Zhakhovsky, I.Yu. Skobelev, V.E. Fortov, V.A. Khohlov, V.V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, T. Kawachi, Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse. J. Appl. Phys. 109, 013504 (2011)

    Article  ADS  Google Scholar 

  16. M. Ishino, A.Ya. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T.A. Pikuz, T. Ohba, T. Kaihori, T. Kawachi, Surface modifications of metals induced by soft x-ray laser pulse irradiations. J. Laser Micro Nanoeng. 7, 147–151 (2012)

    Article  Google Scholar 

  17. S.V. Starikov, V.V. Stegailov, G.E. Norman, V.E. Fortov, M. Ishino, M. Tanaka, N. Hasegawa, M. Nishikino, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, T. Kawachi, S. Tamotsu, T.A. Pikuz, I.Yu. Skobelev, A.Ya. Faenov, Laser ablation of gold: experiment and atomistic simulation. JETP Lett. 93, 642–647 (2011)

    Article  ADS  Google Scholar 

  18. G. Norman, S. Starikov, V. Stegailov, V. Fortov, I. Skobelev, T. Pikuz, A. Faenov, S. Tamotsu, Y. Kato, M. Ishino, M. Tanaka, N. Hasegawa, M. Nishikino, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, Y. Fukuda, M. Kando, T. Kawachi, Nanomodification of gold surface by picosecond soft x-ray laser pulse. J. Appl. Phys. 112, 013104 (2012)

    Article  ADS  Google Scholar 

  19. A.Y. Vorobyev, C. Guo, Enhanced absorptance of gold following multipulse femtosecond laser ablation. Phys. Rev. B 72, 195422 (2005)

    Article  ADS  Google Scholar 

  20. J. Krzywinski, R. Sobierajski, M. Jurek, R. Nietubyc, J.B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlíček, A. Andrejczuk, J. Feldhaus, B. Keitel, E.L. Saldin, E.A. Schneidmiller, R. Treusch, M.V. Yurkov, Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser. J. Appl. Phys. 101, 043107 (2007)

    Article  ADS  Google Scholar 

  21. J. Bonse, S. Baudach, J. Krüger, W. Kautek, M. Lenzner, Femtosecond laser ablation of silicon-modification thresholds and morphology. Appl. Phys. A 74, 19–25 (2002)

    Article  ADS  Google Scholar 

  22. S.E. Kirkwood, A.C. Van Popta, Y.Y. Tsui, R. Fedosejevs, Single and multiple shot near-infrared femtosecond laser pulse ablation thresholds of copper. Appl. Phys. A 81, 729–735 (2005)

    Article  ADS  Google Scholar 

  23. A.Y. Vorobyev, C. Guo, Shot-to-shot correlation of residual energy and optical absorptance in femtosecond laser ablation. Appl. Phys. A 86, 235–241 (2007)

    Article  ADS  Google Scholar 

  24. A.Y. Vorobyev, C. Guo, Femtosecond laser nanostructuring of metals. Opt. Express 14, 2164–2169 (2006)

    Article  ADS  Google Scholar 

  25. N. Hasegawa, T. Kawachi, T. Utsumi, A. Sasaki, M. Tanaka, M. Kado, K. Sukegawa, L. Peixiang, M. Kishimoto, T. Renzhong, K. Nagashima, M. Koike, H. Daido, Y. Kato, High-precision measurement if the wavelength of a nickel-like silver x-ray laser. Jpn. J. Appl. Phys. 43, 2519–2522 (2004)

    Article  ADS  Google Scholar 

  26. Y. Ochi, T. Kawachi, N. Hasegawa, M. Nishikino, T. Ohba, M. Tanaka, M. Nishikino, T. Kaihori, K. Nagashima, A. Sugiyama, Demonstration of sub-micro-Joule, spatially coherent soft x-ray laser pumped by 0.1 Hertz, 10 Joule, picosecond laser. Jpn. J. Appl. Phys. 48, 120212 (2009)

    Article  ADS  Google Scholar 

  27. J.B. Pelka, A. Andrejczuk, H. Reniewicz, N. Schell, J. Krzywiński, R. Sobierajski, A. Wawro, Z.R. Zytkiewicz, D. Klinger, L. Juha, Structure modifications in silicon irradiated by ultra-short pulses of XUV free electron laser. J. Alloys Compd. 382, 264–270 (2004)

    Article  Google Scholar 

  28. N. Srojanovic, D. von der Linde, K. Sokolowcki-Tinten, U. Zastrau, F. Perner, E. Förster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Düsterer, H. Redlin, Ablation of solids using a femtosecond extreme ultraviolet free electron laser. Appl. Phys. Lett. 89, 241909 (2006)

    Article  ADS  Google Scholar 

  29. Y.F. Guan, A.J. Pedraza, J.D. Fowlkes, D.A. Joy, Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles. J. Vac. Sci. Technol. B 22, 2836–2843 (2004)

    Article  Google Scholar 

  30. B.K. Nayak, K. Sun, C. Rothenbach, M.C. Gupta, Self-organized 2D periodic arrays of nanostructures in silicon by nanosecond laser irradiation. Appl. Opt. 50, 2349–2355 (2011)

    Article  Google Scholar 

  31. N.A. Inogamov, A.Ya. Faenov, V.V. Zhakhovsky, I.Yu. Skobelev, V.A. Khokhlov, Y. Kato, M. Tanaka, T.A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S.V. Bulanov, T. Kawachi, Yu.V. Petrov, S.I. Anisimov, V.E. Fortov, Interaction of short laser pulse in wavelength range from infrared to x-ray with metals, semiconductors, and dielectrics. Contrib. Plasma Phys. 51, 361–366 (2011)

    Article  ADS  Google Scholar 

  32. M.A. Green, M.J. Keevers, Optical properties of intrinsic silicon at 300 K. Prog. Photovolt. 3, 189–192 (1995), homepage of PVCDROM at http://pveducation.org/pvcdrom/

    Article  Google Scholar 

  33. D.F. Edwards, Silicon (Si), in Handbook of Optical Constants of Solids, ed. by E.D. Palik (Academic Press, San Diego, 1985), pp. 547–569

    Google Scholar 

  34. B.L. Henke, E.M. Gullikson, J.C. Davis, X-ray interactions: photoabsorption, scattering transmission, and reflection at E=50−30,000 eV, Z=1−92. At. Data Nucl. Data Tables 54, 181–342 (1993), x-ray database at the center for x-ray optics homepage (www.cxro.lbl.gov)

    Article  ADS  Google Scholar 

  35. S. Ahn, D.J. Hwang, H.K. Park, C.P. Grigoropoulos, Femtosecond laser drilling of crystalline and multicrystalline silicon for advanced cell fabrication. Appl. Phys. A 108, 113–120 (2012)

    Article  ADS  Google Scholar 

  36. J. Emsley, The Elements, 2nd edn. (Oxford University Press, London, 1991)

    Google Scholar 

  37. W.M. Haynes (ed.), CRC Handbook of Chemistry and Physics, 91st Edition, 2010–2011 (CRC Press, Boca Raton, 2010)

    Google Scholar 

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Acknowledgements

This work was partly supported by a Grant-in-Aid for Scientific Research (B), No. 21360364 (2009), from the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan. Part of the work was supported by the Russian Foundation for Basic Research (RFBR) grant 12-02-00947a and by the Russian Academy of Science (RAS) Presidium Program of Basic Research 2. We are grateful to Dr. M. Yamagiwa of JAEA for his interest in and encouragement of this work. We would also like to thank Dr. S. Sakaguchi of Nara Women’s University for his assistance with the SEM measurements. Finally, we thank Dr. J. Koga of JAEA for his helpful remarks concerning the text.

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Authors and Affiliations

  1. Quantum Beam Science Directorate, Japan Atomic Energy Agency, Kyoto, 619-0215, Japan

    Masahiko Ishino, Anatoly Y. Faenov, Momoko Tanaka, Noboru Hasegawa, Masaharu Nishikino, Tatiana A. Pikuz, Takeshi Kaihori & Tetsuya Kawachi

  2. Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow, 125412, Russia

    Anatoly Y. Faenov & Tatiana A. Pikuz

  3. Division of Natural Sciences, Faculty, Nara Women’s University, Nara, 630-8506, Japan

    Satoshi Tamotsu

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  1. Masahiko Ishino
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Correspondence to Masahiko Ishino.

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Ishino, M., Faenov, A.Y., Tanaka, M. et al. Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam. Appl. Phys. A 110, 179–188 (2013). https://doi.org/10.1007/s00339-012-7100-6

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