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Super-resolution readout property of bismuth-doped antimony-based thin film as a functional mask for read-only memory

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Abstract

Bismuth-doped antimony-based (Sb100−x Bi x , x=2.46) thin films were presented as a functional mask for super-resolution readout of read-only memory (ROM). The pit size of the ROM was 390 nm, and super-resolution readout was realized on a dynamic tester with laser wavelength of 780 nm and the numerical aperture of the focusing objective lens of 0.45. The carrier-to-noise ratio (CNR) of 22 dB, readout threshold power of 0.8 mW and super-resolution readout cycles of 2×104 was achieved. The influence of film thickness and readout power on CNR was investigated. The reflectivity and transmittance of the film with different temperature at wavelength of 780 nm were detected, and the super-resolution mechanism of the bismuth-doped antimony-based thin films as the functional mask layer was discussed.

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Acknowledgements

This work was partially supported by the National Natural Science Foundation of China (Grant Nos. 61137002 and 61178059).

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Authors and Affiliations

  1. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, No. 390, Qinghe Road, Jiading District, Shanghai, 201800, China

    Xinmiao Lu, Yiqun Wu, Yang Wang & Jingsong Wei

  2. Key Lab of Functional Inorganic Material Chemistry, Heilongjiang University, Ministry of Education, Harbin, 150080, China

    Yiqun Wu

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  1. Xinmiao Lu
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  2. Yiqun Wu
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  3. Yang Wang
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  4. Jingsong Wei
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Correspondence to Yiqun Wu.

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Lu, X., Wu, Y., Wang, Y. et al. Super-resolution readout property of bismuth-doped antimony-based thin film as a functional mask for read-only memory. Appl. Phys. A 108, 765–769 (2012). https://doi.org/10.1007/s00339-012-6968-5

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  • DOI: https://doi.org/10.1007/s00339-012-6968-5

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