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Optimization of laser printing of nanoparticle suspensions for microelectronic applications

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Abstract

Digital printing of interconnects for electronic devices requires processes capable of delivering controlled amounts of conductive inks in a fast and accurate way. Laser-induced forward transfer (LIFT) is an emerging technology that enables controlled printing of voxels of a wide range of inks with micrometer resolution. Its use with high solids content nanoparticle suspensions results in the deposition of voxels shaped as the impinging laser beam. This allows higher processing speeds, increasing the throughput of the technique. However, the optimum conditions for printing spot-like voxels have not been determined, yet. In this work, we perform a systematic study of the main experimental parameters, including laser pulse energy, laser beam dimensions, and gap distance, in order to understand the role that these parameters play in laser printing. Based on these results, we find that there is a narrow fluence range at distances close to the receiving substrate where spot-like voxels are deposited. We also provide a detailed discussion of the possible mechanisms that may lead to the observed features.

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Acknowledgements

This work has benefitted from a research program funded by MCI of the Spanish Government (Projects MAT2010-15905 and CSD2008-00023), and Fondo Europeo de Desarrollo Regional (FEDER). The Office of Naval Research sponsored part of this work.

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Author notes

  1. Martí Duocastella

    Present address: Dept. of Mechanical and Aerospace Engineering, Princeton University, Princeton, NJ, 08544, USA

Authors and Affiliations

  1. Departament de Física Aplicada i Òptica, Universitat de Barcelona, Martí i Franquès 1, 08028, Barcelona, Spain

    Martí Duocastella & Pere Serra

  2. Materials Science and Technology Division, Code 6364, Naval Research Laboratory, Washington, DC, 20375, USA

    Heungsoo Kim & Alberto Piqué

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  1. Martí Duocastella
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  2. Heungsoo Kim
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  4. Alberto Piqué
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Correspondence to Alberto Piqué.

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Duocastella, M., Kim, H., Serra, P. et al. Optimization of laser printing of nanoparticle suspensions for microelectronic applications. Appl. Phys. A 106, 471–478 (2012). https://doi.org/10.1007/s00339-011-6751-z

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  • DOI: https://doi.org/10.1007/s00339-011-6751-z

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