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Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

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Abstract

We present the results of the characterization of Mg/Co periodic multilayers and their thermal stability for the EUV range. The annealing study is performed up to a temperature of 400∘C. Images obtained by scanning transmission electron microscopy and electron energy loss spectroscopy clearly show a good quality of the multilayer structure. The measurements of the EUV reflectivity around 25 nm (∼49 eV) indicate that the reflectivity decreases when the annealing temperature increases above 300∘C. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. Nuclear magnetic resonance used to determine the chemical state of the Co atoms and scanning electron microscopy images of cross sections of the Mg/Co multilayers reveal changes in the morphology of the stack from an annealing temperature of 305∘C. This explains the observed reflectivity loss.

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Acknowledgements

The authors from Tongji University are indebted to the National Natural Science Foundation of China (Granted No. 10825521 and 11061130549). Part of this work was made within the framework of the French TEM and Atom-probe network (METSA) and the ANR project COBMUL (J10R069).

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Authors and Affiliations

  1. Laboratoire Chimie Physique—Matière Rayonnement, UPMC Univ Paris 06, CNRS UMR 7614, 11 rue Pierre et Marie Curie, 75231, Paris Cedex 05, France

    M.-H. Hu, K. Le Guen, J.-M. André & P. Jonnard

  2. Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai, 200092, P.R. China

    S. K. Zhou, H. C. Li, J. T. Zhu & Z. S. Wang

  3. Institut de Physique et Chimie des Matériaux de Strasbourg, CNRS UMR 7504, 23 rue du Loess, BP 43, 67034, Strasbourg Cedex 2, France

    C. Meny

  4. CNR-IOM Laboratorio TASC, SS 14 km 163,5, 34149, Basovizza, Trieste, Italy

    N. Mahne, A. Giglia & S. Nannarone

  5. Dipartimento Ingegneria Materiali, Università di Modenae R.E., via Vignolese 905/a, Modena, Italy

    S. Nannarone

  6. Institut de Minéralogie et de Physique des Milieux Condensés, Univ Paris 06 et 07, CNRS UMR 7590, 4 place Jussieu, 75252, Paris Cedex 05, France

    I. Estève

  7. Laboratoire de Physiques des Solides, CNRS UMR 8502, Univ Paris Sud, 91405, Orsay, France

    M. Walls

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  1. M.-H. Hu
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  2. K. Le Guen
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  3. J.-M. André
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  8. C. Meny
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  9. N. Mahne
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  10. A. Giglia
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  11. S. Nannarone
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  14. P. Jonnard
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Correspondence to P. Jonnard.

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Hu, MH., Le Guen, K., André, JM. et al. Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications. Appl. Phys. A 106, 737–745 (2012). https://doi.org/10.1007/s00339-011-6681-9

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  • DOI: https://doi.org/10.1007/s00339-011-6681-9

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