Abstract
Gradual evolution of self-induced silicon surface topology from one-dimensional ridge-like to two-dimensional spike-like nanogratings and then to isotropic sets of micro-columns was observed by evenly increasing IR and UV femtosecond laser irradiation dose. This topological evolution exhibits clear indications of consequent melting and vaporization processes being set up during the prolonged laser irradiation. Monotonously decreasing cumulative IR and UV femtosecond laser-nanostructuring thresholds may indicate an increase of optical absorbance of the laser-nanostructured silicon surfaces versus the increasing laser dose, consistent with the consequent onset of the abovementioned thermal modification processes.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
E.D. Diebold, P. Peng, E. Mazur, J. Am. Chem. Soc. 131, 16356 (2009)
E.D. Diebold, N.H. Mack, S.K. Doorn, E. Mazur, Langmuir 25, 1790 (2009)
Z. Huang, J.E. Carey, M. Liu, X. Guo, E. Mazur, J.C. Campbell, Appl. Phys. Lett. 89, 033506 (2006)
R.A. Myers, R. Farrell, A. Karger, J.E. Carey, E. Mazur, Appl. Opt. 45, 8825 (2006)
Y. Dong, P. Molian, Appl. Phys. Lett. 84, 10 (2004)
S.I. Dolgaev, S.V. Lavrishev, A.A. Lyalin, A.V. Simakin, V.V. Voronov, G.A. Shafeev, Appl. Phys. A 73, 177 (2001)
A.J. Pedraza, J.D. Fowlkes, Y.-F. Guan, Appl. Phys. A 77, 277 (2003)
M.Y. Shen, C.H. Crouch, J.E. Carey, E. Mazur, Appl. Phys. Lett. 85, 5694 (2004)
E.V. Golosov, V.I. Emel’yanov, A.A. Ionin, Yu.R. Kolobov, S.I. Kudryashov, A.E. Ligachev, Yu.N. Novoselov, L.V. Seleznev, D.V. Sinitsyn, JETP Lett. 90, 107 (2009)
S.M. Klimentov, T.V. Kononenko, P.A. Pivovarov, V.I. Konov, A.M. Prokhorov, D. Breitling, F. Dausinger, Quantum Electron. 32, 433 (2002)
A.A. Ionin, S.I. Kudryashov, S.V. Makarov, L.V. Seleznev, D.V. Sinitsyn, JETP Lett. 90, 423 (2009)
J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Phys. Rev. B 27, 1141 (1983)
S.A. Akhmanov, V.I. Emel’yanov, N.I. Koroteev, V.N. Seminogov, Usp. Fiz. Nauk 147, 675 (1985) [Sov. Phys. Usp. 28, 1084 (1985)]
S.I. Kudryashov, V.I. Emel’yanov, J. Exp. Theor. Phys. 94, 94 (2002)
I.S. Grigor’ev, E.Z. Meylikhova (eds.), Fizicheskie Velichini (Energoatomizdat, Moscow, 1991)
B.R. Tull, J.E. Carey, E. Mazur, J. McDonald, S.M. Jalisove, Mater. Res. Soc. Bull. 31, 626 (2006)
S. Jesse, A.J. Pedraza, J.D. Fowlkes, J.D. Budai, J. Mater. Res. 17, 1002 (2002)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Golosov, E.V., Ionin, A.A., Kolobov, Y.R. et al. Topological evolution of self-induced silicon nanogratings during prolonged femtosecond laser irradiation. Appl. Phys. A 104, 701–705 (2011). https://doi.org/10.1007/s00339-011-6323-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-011-6323-2