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Nondestructive 3-D imaging of femtosecond laser written volumetric structures using optical coherence microscopy

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Abstract

Nondestructive three-dimensional imaging of femtosecond laser-written buried structures is demonstrated using optical coherence microscopy providing lateral and depth resolution on a micron scale. This high speed technique, which requires no sample preparation, enables the visualization of volumetric structural modification created deep in transparent dielectric medium with high signal/noise contrast. Images of buried void structures with dimensions as large as 190 μm in length were obtained without shadowing effects impugning the image fidelity.

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Correspondence to Martin C. Richardson.

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Choi, J., Lee, KS., Rolland, J.P. et al. Nondestructive 3-D imaging of femtosecond laser written volumetric structures using optical coherence microscopy. Appl. Phys. A 104, 289–294 (2011). https://doi.org/10.1007/s00339-010-6127-9

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  • DOI: https://doi.org/10.1007/s00339-010-6127-9

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