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A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

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Abstract

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

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Authors and Affiliations

  1. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China

    Lingling Qiao, Fei He, Chen Wang & Ya Cheng

  2. Graduate School of the Chinese Academy of Sciences, Beijing, 100039, China

    Lingling Qiao & Fei He

  3. Laser Technology Laboratory, RIKEN—Advanced Science Institute, Hirosawa 2-1, Wako, Saitama, 351-0198, Japan

    Koji Sugioka & Katsumi Midorikawa

Authors
  1. Lingling Qiao
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  2. Fei He
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  3. Chen Wang
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  4. Ya Cheng
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  5. Koji Sugioka
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  6. Katsumi Midorikawa
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Corresponding author

Correspondence to Ya Cheng.

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Qiao, L., He, F., Wang, C. et al. A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining. Appl. Phys. A 102, 179–183 (2011). https://doi.org/10.1007/s00339-010-6096-z

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  • DOI: https://doi.org/10.1007/s00339-010-6096-z

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