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Introduction of Zr in nanometric periodic Mg/Co multilayers

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Abstract

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, and then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements, respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45° of grazing incidence and reaches 51.3% upon annealing at 200°C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.

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Authors and Affiliations

  1. Laboratoire de Chimie Physique—Matière Rayonnement, UPMC Univ Paris 06, CNRS UMR 7614, 11 rue Pierre et Marie Curie, 75231, Paris cedex 05, France

    K. Le Guen, M.-H. Hu, J.-M. André & P. Jonnard

  2. Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai, 200092, P.R. China

    S. K. Zhou, H. C. Li, J. T. Zhu & Z. S. Wang

  3. Istituto Officina dei Materiali IOM-CNR Laboratorio TASC, S.S.14. km 163.5 in Area Science Park, 34012, Trieste, Italy

    N. Mahne, A. Giglia & S. Nannarone

Authors
  1. K. Le Guen
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  2. M.-H. Hu
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  3. J.-M. André
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  4. P. Jonnard
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  5. S. K. Zhou
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  6. H. C. Li
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  7. J. T. Zhu
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  8. Z. S. Wang
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  9. N. Mahne
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  10. A. Giglia
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  11. S. Nannarone
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Corresponding author

Correspondence to K. Le Guen.

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Le Guen, K., Hu, MH., André, JM. et al. Introduction of Zr in nanometric periodic Mg/Co multilayers. Appl. Phys. A 102, 69–77 (2011). https://doi.org/10.1007/s00339-010-6093-2

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  • DOI: https://doi.org/10.1007/s00339-010-6093-2

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