Abstract
We present an enhanced model to describe the physics of laser chemical processing (LCP), a liquid jet guided laser technique, for local doping processes applied to crystalline silicon solar cells. The main improvement of the numerical model is the consideration of the inhomogeneous laser light intensity profile within the liquid jet cross section. Measurements of the intensity profile show local superelevations of up to factor five compared to the average intensity. A measured intensity profile was implemented into the numerical model and yields good agreement between simulated and measured dopant distributions. Inhomogeneities of the spatial dopant distribution are observed and their impact on LCP line scans for producing doped lines is investigated with respect to solar cell manufacturing.
Similar content being viewed by others
References
J.F. Nijs, J. Szlufcik, J. Poortmans, S. Sivoththaman, R.P. Mertens, IEEE Trans. Electron Devices 46(10), 1948–1969 (1999)
D. Kray, A. Fell, S. Hopman, K. Mayer, S.W. Glunz, G.P. Willeke, Appl. Phys. A 93(1), 99–103 (2008)
B. Richerzhagen, Dissertation, École Polytechnique Fédérale de Lausanne, 1994
B. Richerzhagen, Patent No. EP0762947, 2003
D. Kray, M. Alemán, A. Fell, S. Hopman, K. Mayer, M. Mesec, R. Müller, G.P. Willeke, S.W. Glunz, B. Bitnar, D.-H. Neuhaus, R. Lüdemann, T. Schlenker, D. Manz, A. Bentzen, E. Sauar, A. Pauchard, B. Richerzhagen, in 33rd IEEE Photovoltaic Specialists Conference, San Diego, 2008
S. Hopman, A. Fell, K. Mayer, C. Fleischmann, D. Kray, F. Granek, in 24th European Photovoltaic Solar Energy Conference, Hamburg, 2009
A. Fell, D. Kray, G.P. Willeke, Appl. Phys. A 92(4), 987–991 (2008)
A. Fell, D. Kray, T. Wütherich, M.R., G.P. Willeke, S.W. Glunz, in 23rd European Photovoltaic Solar Energy Conference, Valencia, 2008
A. Fell, G.P. Willeke, Appl. Phys. A 98(2), 435–440 (2009)
D.H. Lowndes, R.F. Wood, R.D. Westbrook, Appl. Phys. Lett. 43(1), 258–260 (1983)
P. Couty, F. Wagner, P. Hoffmann, Opt. Eng. 44(6), 068001-068001-068008 (2005)
H.A. MacLeod, Thin Film Optical Filters, 3rd edn. (Inst. of Physics Pub., Bristol, 2001)
D. Bäuerle, Laser Processing and Chemistry (Springer, Berlin, 2000)
S. Hopman, A. Fell, K. Mayer, M. Mesec, A. Rodofili, D. Kray, Appl. Phys. A 95, 857–866 (2009)
A. Knorz, M. Peters, A. Grohe, C. Harmel, R. Preu, Prog. Photovolt.: Res. Appl. 2008, 1–10 (2008)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Fell, A., Hopman, S. & Granek, F. Simulation supported description of the local doping formation using laser chemical processing (LCP). Appl. Phys. A 104, 165–170 (2011). https://doi.org/10.1007/s00339-010-6089-y
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-010-6089-y