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Electrical and optical properties of ITO and ITO/Cr-doped ITO films


In this paper we report on the effects of the insertion of Cr atoms on the electrical and optical properties of indium tin oxide (ITO) films to be used as electrodes in spin-polarized light-emitting devices. ITO films and ITO(80 nm)/Cr-doped ITO(20 nm) bilayers and Cr-doped ITO films with a thickness of 20 nm were grown by pulsed ArF excimer laser deposition. The optical, structural, morphological and electrical properties of ITO films and ITO/Cr-doped structures were characterized by UV–Visible transmission and reflection spectroscopy, transmission electron microscopy (TEM), atomic force microscopy (AFM) and Hall-effect analysis. For the different investigations, the samples were deposited on different substrates like silica and carbon coated Cu grids. ITO films with a thickness of 100 nm, a resistivity as low as ∼4×10−4 Ω cm, an energy gap of ∼4.3 eV and an atomic scale roughness were deposited at room temperature without any post-deposition process. The insertion of Cr into the ITO matrix in the upper 20 nm of the ITO matrix induced variations in the physical properties of the structure like an increase of average roughness (∼0.4–0.5 nm) and resistivity (up to ∼8×10−4 Ω cm). These variations were correlated to the microstructure of the Cr-doped ITO films with particular attention to the upper 20 nm.

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Correspondence to A. P. Caricato.

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Caricato, A.P., Cesaria, M., Luches, A. et al. Electrical and optical properties of ITO and ITO/Cr-doped ITO films. Appl. Phys. A 101, 753–758 (2010).

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  • Atomic Force Microscopy
  • Pulse Laser Deposition
  • Indium Oxide
  • Chromium Oxide
  • Visible Transmission