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Laser printing of multi-layered polymer/metal heterostructures for electronic and MEMS devices

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Abstract

A laser forward transfer technique for the simultaneous printing of polymer/metal stacked micro-laminates is introduced. Several different material combinations as well as stacking architectures are presented including single laser pulse deposited dual layer capacitors, three-layer stacks for potentially printing organic thin-film transistors (OTFTs), and photo-definable polymer/metal laminates and free-standing membranes for MEMS based sensors.

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Authors and Affiliations

  1. Materials Science and Technology Division, Code 6364, Naval Research Laboratory, Washington, DC, 20375, USA

    Andrew J. Birnbaum, Heungsoo Kim, Nicholas A. Charipar & Alberto Piqué

Authors
  1. Andrew J. Birnbaum
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  2. Heungsoo Kim
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  3. Nicholas A. Charipar
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  4. Alberto Piqué
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Correspondence to Alberto Piqué.

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Birnbaum, A.J., Kim, H., Charipar, N.A. et al. Laser printing of multi-layered polymer/metal heterostructures for electronic and MEMS devices. Appl. Phys. A 99, 711–716 (2010). https://doi.org/10.1007/s00339-010-5743-8

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  • DOI: https://doi.org/10.1007/s00339-010-5743-8

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