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Large-format fabrication by two-photon polymerization in SU-8

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Abstract

Microporous structures are central to many fields of science and engineering, but many of these systems are complex with little or no symmetry and are difficult to fabricate. We applied two-photon polymerization (2PP) and femtosecond laser direct-writing techniques to fabricate broad-area large-format 3D microporous structures (450 μm × 450 μm × 40 μm) in the epoxy-based photoresist SU-8. The appropriate exposure was determined by controlling average pulse energies and stage speeds to generate the exposure curves. Mechanical distortion exhibited in suspended walls fabricated by 2PP laser writing was studied by controlling wall lengths and widths. A simple thermal-expansion model is presented to explain the distortion caused by axial loadings of the walls.

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Authors and Affiliations

  1. Department of Physics, Purdue University, 525 Northwestern Avenue, West Lafayatte, IN, 47907, USA

    Yihong Liu, David D. Nolte & Laura J. Pyrak-Nolte

  2. Department of Earth and Atmospheric Sciences, Purdue University, 550 Stadium Mall Dr, West Lafayatte, IN, 47907, USA

    Laura J. Pyrak-Nolte

Authors
  1. Yihong Liu
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  2. David D. Nolte
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  3. Laura J. Pyrak-Nolte
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Correspondence to Yihong Liu.

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Liu, Y., Nolte, D.D. & Pyrak-Nolte, L.J. Large-format fabrication by two-photon polymerization in SU-8. Appl. Phys. A 100, 181–191 (2010). https://doi.org/10.1007/s00339-010-5735-8

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  • DOI: https://doi.org/10.1007/s00339-010-5735-8

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