Abstract
By the solvent vaporization convection self-assembly method, 1.86 μm silica microspheres were assembled into a colloidal crystal template with long-range order. High refractive index silicon was then filled in the voids of the silica template by the low pressure chemical vapor deposition method. A 3-dimensional silicon inverse opal photonic crystal was obtained with a photonic band gap simulated by a plane wave expansion method. Its micro modality and photonic band gap properties were characterized by scanning electron microscopy and Fourier transform IR spectrometer. There was a good agreement between the measured spectra and the simulated results. The tilt-angle reflectance spectra showed that an obvious reflection peak at 3319 nm stayed in existence with different incidence directions. This result proved that silicon inverse opal has a complete photonic band gap in the mid infrared range. This study opens up an opportunity to create Si-based photonic crystal devices for atmosphere mid infrared photodetection.
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Li, YJ., Xie, K., Xu, J. et al. Mid infrared band gap properties of 3-dimensional silicon inverse opal photonic crystal. Appl. Phys. A 99, 117–123 (2010). https://doi.org/10.1007/s00339-010-5565-8
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DOI: https://doi.org/10.1007/s00339-010-5565-8