Abstract
In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and −6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k t ) and high piezoelectric constant (d 33) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency.
Similar content being viewed by others
References
C. Passmann, H. Emert, Proc. IEEE Ultrason. Symp. 1661 (1994)
D.H. Turnbull, B.G. Starkoski, K.A. Harasiewicz, I.L. Semple, L. From, A.K. Gupta, D.N. Sauder, F.S. Foster, J. Ultrason. Med. 21, 71 (1995)
C. Bruce, D. Packer, M. Belohlavek, J. Am. Soc. Echocardiogr. 13, 788 (2000)
J. Pavlin, F.S. Stuart, Ultrasound Biomicroscopy of the Eye (Springer, Berlin, 1995)
T.A. Ritter, K.K. Shung, W.W. Cao, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 217 (2002)
J.M. Cannata, T.A. Ritter, W.H. Chen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50, 1548 (2003)
A. Fleischman, R. Modi, A. Nair, Sens. Actuators A Phys. 103, 76 (2003)
P. Gaucher, Piezoelectric micro-electro-mechanical systems for acoustic applications, in Piezoelectric Materials in Devices, ed. by N. Setter, Ceramics Laboratory, EPFL Swiss Federal Institute of Technology (2002), Chap. 13.
Q.F. Zhou, C. Sharp, J.M. Cannata, G.H. Feng, E.S. Kim, K.K. Shung, Appl. Phys. Lett. 90, 113502 (2007)
Q.Q. Zhang, F.T. Djuth, Q.F. Zhou, Ultrasonics 44, 711 (2006)
E.J. Gottlieb, J.M. Cannata, C.H. Hu, K.K. Shung, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53, 1037 (2006)
K.K. Shung, Diagnostic Ultrasound-Imaging and Blood Flow Measurements (CRC Press, Boca Raton, 2006), p. 47, Chap. 3
R.E. Service, Sci. 275, 1878 (1997)
H. Luo, G. Xu, P. Wang, Z. Yin, Ferroelectrics 231, 97 (1999)
IEEE Standard on Piezoelectricity. Standard 176-1987 (1987)
J. Peng, C. Chao, J.Y. Dai, H.L.W. Chan, H. Luo, Mater. Lett. 62, 3127 (2008)
A.R. Selfridge, The design and fabrication of ultrasonic transducers and transducer arrays. Ph.D. Dissertation, Stanford University, Stanford, CA (July 1983)
G.R. Lockwood, D.H. Turnbull, F.S. Foster, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 41, 231–235 (1994)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Peng, J., Lau, S.T., Chao, C. et al. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers. Appl. Phys. A 98, 233 (2010). https://doi.org/10.1007/s00339-009-5381-1
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00339-009-5381-1