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Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity

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Abstract

In this paper, we present a study on two-channel multilayer mirrors which can operate at two wavelengths in Extreme Ultraviolet (EUV) spectral range. We propose a new method to design two-channel EUV multilayer mirrors with enhanced spectral selectivity. The mirror structure is a stack of two periodic multilayers separated by a buffer layer. We have defined the main parameters which allow adjustment of the distance between different order Bragg’s peak and of wavelength positions of reflectivity minima. Two mirrors have been designed and deposited for solar EUV telescope applications by using this method. The first mirror reflects Fe IX–X line (17.1 nm) and Fe XVI (33.5 nm) lines with attenuation of the He II line (30.4 nm). The second mirror reflects Fe IX–X and He II lines with attenuation of Fe XV (28.4 nm) and Fe XVI lines. Measurements with synchrotron radiation source confirm that, in both cases, for these mirrors, we are able to adjust reflectivity maxima (Bragg peak position) and minima. Such multilayers offer new possibilities for compact design of multi-wavelength EUV telescopes and/or for high spectral selectivity.

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References

  1. J.P. Delaboudinière, G.E. Artzner, J. Brunaud, A.H. Gabriel, J.F. Hochedez, F. Millier, X.Y. Song, B. Au, K.P. Dere, R.A. Howard, R. Kreplin, D.J. Michels, J.D. Moses, J.M. Defise, C. Jamar, P. Rochus, J.P. Chauvineau, J.P. Marioge, R.C. Catura, J.R. Lemen, L. Shing, R.A. Stern, J.B. Gurman, W.M. Neupert, A. Maucherat, F. Clette, P. Cugnon, E.L. Dessel, Sol. Phys. 162(1), 291–312 (1995)

    Article  ADS  Google Scholar 

  2. J. Gautier, F. Delmotte, M. Ravet, A. Jérome, F. Bridou, F. Varnière, F. Auchère, Opt. Commun. 281(11), 3032–3035 (2008)

    Article  ADS  Google Scholar 

  3. C. Hecquet, M. Ravet-Krill, F. Delmotte, A. Jérome, A. Hardouin, F. Bridou, F. Varnière, M. Roulliay, F. Bourcier, J. Desmarres, V. Costes, J. Berthon, A. Rinchet, R. Geyl, Proc. SPIE 6586(1), 65860X (2007)

    Article  Google Scholar 

  4. F. Auchère, M. Ravet-Krill, J.D. Moses, F. Rouesnel, J. Moalic, D. Barbet, C. Hecquet, A. Jérome, R. Mercier, J. Leclec’h, F. Delmotte, J.S. Newmark, Proc. SPIE 6689(1), 66890A (2007)

    Article  Google Scholar 

  5. K. Dere, E. Landi, H. Mason, B.M. Fossi, P. Young, Astron. Astrophys. Suppl. Ser. 125, 149–173 (1997)

    Article  ADS  Google Scholar 

  6. E.A. Spiller, Soft X-Ray Optics (SPIE, Bellingham, 1994), p. 290

    Google Scholar 

  7. P.H. Berning, A.F. Turner, J. Opt. Soc. Am. OSA 47(3), 230–239 (1957)

    Article  ADS  Google Scholar 

  8. O.P. Rustgi, J. Opt. Soc. Am. OSA 55(6), 630–634 (1965)

    Article  ADS  Google Scholar 

  9. R.J. Schumacher, W.R. Hunter, Appl. Opt. OSA 16(4), 904–908 (1977)

    ADS  Google Scholar 

  10. M.P. Kowalski, J.F. Seely, W.R. Hunter, J.C. Rife, J.T.W. Barbee, G.E. Holland, C.N. Boyer, C.M. Brown, R.G. Cruddace, Appl. Opt. OSA 32(13), 2422–2425 (1993)

    ADS  Google Scholar 

  11. J. Troy, W. Barbee, S. Mrowka, M.C. Hettrick, Appl. Opt. OSA 24(6), 883–886 (1985)

    Article  ADS  Google Scholar 

  12. J. Chauvineau, J. Clotaire, G. Colas, O. Lam, J. Manneville, J. Marioge, M. Mullot, A. Raynal, G. Tissot, L. Valiergue, J. Delaboudiniere, Proc. SPIE 1546(1), 576–586 (1992)

    Article  ADS  Google Scholar 

  13. M. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. Delaboudiniere, Proc. SPIE 5250(1), 99–108 (2004)

    Article  ADS  Google Scholar 

  14. J. Wuelser, J.R. Lemen, T.D. Tarbell, C.J. Wolfson, J.C. Cannon, B.A. Carpenter, D.W. Duncan, G.S. Gradwohl, S.B. Meyer, A.S. Moore, R.L. Navarro, J.D. Pearson, G.R. Rossi, L.A. Springer, R.A. Howard, J.D. Moses, J.S. Newmark, J. Delaboudiniere, G.E. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M. Ravet, X. Song, V. Bothmer, W. Deutsch, Proc. SPIE 5171(1), 111–122 (2004)

    Article  ADS  Google Scholar 

  15. D.L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, Appl. Opt. OSA 43(9), 1835–1848 (2004)

    Article  ADS  Google Scholar 

  16. J. Defise, J. Halain, D. Berghmans, F. Denis, E. Mazy, T. Thibert, J. Lecat, P. Rochus, B. Nicula, A.D. Groof, J. Hochedez, U. Schühle, M. Ravet, F. Delmotte, Proc. SPIE 6689(1), 66890S (2007)

    Article  Google Scholar 

  17. T. Ejima, Y. Kondo, M. Watanabe, Jpn. J. Appl. Phys. 40, 376–379 (2001)

    Article  ADS  Google Scholar 

  18. Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, Nucl. Instrum. Methods Phys. Res. A 467–468(1), 333–336 (2001)

    Article  Google Scholar 

  19. J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. Ravet, A. Jérome, Appl. Opt. OSA 44(3), 384–390 (2005)

    Article  ADS  Google Scholar 

  20. F. Delmotte, J. Gautier, M. Roulliay, M.F. Ravet, F. Bridou, A. Jérome, Nucl. Instrum. Methods Phys. Res. A 5963(1), 59631V (2005)

    Google Scholar 

  21. B. Henke, E. Gullikson, J. Davis, At. Data Nucl. Data Tables 54(2), 181–342 (1993)

    Article  ADS  Google Scholar 

  22. E.M. Gullikson, P. Denham, S. Mrowka, J.H. Underwood, Phys. Rev. B Am. Phys. Soc. 49(23), 16283–16288 (1994)

    Article  ADS  Google Scholar 

  23. R. Soufli, E.M. Gullikson, Appl. Opt. OSA 37(10), 1713–1719 (1998)

    Article  ADS  Google Scholar 

  24. H. Kiessig, Ann. Phys. 402(7), 769–788 (1931)

    Article  Google Scholar 

  25. S. Bajt, J.B. Alameda, T.W. Barbee, W.M. Clift, J.A. Folta, B. Kaufmann, E.A. Spiller, Opt. Eng. 41(8), 1797–1804 (2002)

    Article  ADS  Google Scholar 

  26. H. Maury, P. Jonnard, J. André, J. Gautier, M. Roulliay, F. Bridou, F. Delmotte, M. Ravet-Krill, A. Jérome, P. Holliger, Thin Solid Films 514(1–2), 278–286 (2006)

    Article  ADS  Google Scholar 

  27. D.L. Windt, Comput. Phys. 12(4), 360 (1998)

    Article  ADS  Google Scholar 

  28. F. Bridou, B.A. Pardo, J. Opt. 21(4), 183–191 (1990)

    Article  ADS  Google Scholar 

  29. S. Nannarone, F. Borgatti, A. Deluisa, B.P. Doyle, G.C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M.G. Pelizzo, G. Tondello, AIP Conf. Proc. 705, 450–453 (2004)

    Article  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Laboratoire Charles Fabry, Institut d’Optique, CNRS, Univ. Paris-Sud, Campus Polytechnique, RD 128, 91127, Palaiseau Cedex, France

    Christophe Hecquet, Franck Delmotte, Marie-Françoise Ravet-Krill, Sébastien de Rossi, Arnaud Jérome, Françoise Bridou, Françoise Varnière & Evgueni Meltchakov

  2. Institut d’Astrophysique Spatiale, CNRS, Univ. Paris-Sud, bât. 121, 91405, Orsay Cedex, France

    Frédéric Auchère

  3. Laboratorio TASC-INFM-CNR, S.S. 14, km 163.5 in Area Science Park, Trieste, 34012, Italy

    Angelo Giglia, Nicola Mahne & Stefano Nanaronne

  4. Dipartimento di Ingegneria dei Materiali e dell’Ambiente, Universita di Modena e Reggio Emilia, via Vignolese 905, 41100, Modena, Italy

    Stefano Nanaronne

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  1. Christophe Hecquet
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  2. Franck Delmotte
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  3. Marie-Françoise Ravet-Krill
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  4. Sébastien de Rossi
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  5. Arnaud Jérome
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  6. Françoise Bridou
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  9. Frédéric Auchère
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  12. Stefano Nanaronne
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Correspondence to Christophe Hecquet.

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Hecquet, C., Delmotte, F., Ravet-Krill, MF. et al. Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity. Appl. Phys. A 95, 401–408 (2009). https://doi.org/10.1007/s00339-009-5082-9

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  • DOI: https://doi.org/10.1007/s00339-009-5082-9

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