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Synthesis of crystalline TiN and Si particles by laser ablation in liquid nitrogen

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Abstract

Laser ablation of titanium and silicon targets immersed in liquid nitrogen was carried out using a YAG laser at 1.06 μm. Synthesized particles were collected and were characterized by TEM, SEM, EDS, XRD, and XPS. In the case of a titanium target, the synthesized particles had an atomic ratio of N/Ti=0.4 and a polycrystalline structure with many XRD peaks of TiN. This result indicates the usefulness of laser ablation in liquid nitrogen for synthesizing nitrides. On the other hand, in the case of a silicon target, the nitridation of the synthesized particles was negligible, and the synthesized particles had a polycrystalline structure of pure cubic silicon. This means that the oxygen-free environment realized by liquid nitrogen is useful for synthesizing particles with negligible oxidation.

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Authors and Affiliations

  1. Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan

    N. Takada

  2. Nanoarchitectonics Research Center, National Institute of Advanced Industrial Science and Technology, Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki, 305-8565, Japan

    T. Sasaki

  3. Plasma Nanotechnology Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan

    K. Sasaki

Authors
  1. N. Takada
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  2. T. Sasaki
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  3. K. Sasaki
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Correspondence to K. Sasaki.

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Takada, N., Sasaki, T. & Sasaki, K. Synthesis of crystalline TiN and Si particles by laser ablation in liquid nitrogen. Appl. Phys. A 93, 833–836 (2008). https://doi.org/10.1007/s00339-008-4748-z

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  • DOI: https://doi.org/10.1007/s00339-008-4748-z

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