Abstract
We have synthesized 5 wt. %-yttria-stabilized zirconia (YSZ) films on stainless steel and glass substrates by pulsed laser deposition (PLD) at substrate temperatures between 60 and 600 °C and oxygen pressures from 0.1 to 1000 mTorr. While highly (101)-oriented tetragonal YSZ films are obtained at intermediate oxygen pressures, near complete (001)-oriented tetragonal films are achieved at lower oxygen pressures, with a full width at half maximum X-ray peak of only 0.4°. The results can be attributed to surface energy-induced orientation; that is, the lowest surface energy plane of the YSZ films changes from (101) plane at intermediate pressures to the (001) plane at lower oxygen pressures due to surface relaxation.
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81.15.Fg; 83.85.Hf; 68.55.jm
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Zhang, X., Berdahl, P., Klini, A. et al. Transition of crystalline orientation of yttria-stabilized zirconia films grown by pulsed laser deposition. Appl. Phys. A 91, 407–410 (2008). https://doi.org/10.1007/s00339-008-4475-5
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DOI: https://doi.org/10.1007/s00339-008-4475-5