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Improved dielectric and electrical properties of (Ba,Sr)TiO3 thin films using Pt/LaNiO3 as the top-electrode material

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Abstract

(Ba,Sr)TiO3 (BST) capacitors grown on a LaNiO3 (LNO) bottom electrode, with Pt (80 nm), LNO (100 nm), and double-layer Pt/LNO (80/10 nm) top electrodes have been investigated. It was found that the dielectric behavior is improved by a decrease of the electrical properties for the BST capacitor using double-layer Pt/LNO top electrodes. The dielectric constant of 100 nm-thick BST films with a Pt electrode was only 165 at 100 kHz, while that with a double-layer electrode was about 242. Correspondingly, the tunability was greatly improved from 26% to 41% with an electric field of 600 kV/cm. These have been attributed to increased interfacial capacitance density, which resulted from an improved interface, between the films and the top electrode. The dielectric loss was also reduced by using a double-layer electrode. Furthermore, the leakage current of a capacitor with a double-layer Pt/LNO electrode was one order of magnitude lower than that with a single LNO electrode. It can be explained by the fact that the weak chemical interaction between LNO (10 nm) and BST causes a high potential barrier at the interface.

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Authors and Affiliations

  1. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, P.R. China

    Y.H. Gao, J.L. Sun, J.H. Ma, X.J. Meng & J.H. Chu

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  1. Y.H. Gao
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  2. J.L. Sun
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  3. J.H. Ma
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  4. X.J. Meng
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  5. J.H. Chu
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Correspondence to Y.H. Gao.

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PACS

81.15.-z; 81.15.Cd; 77.55.+f; 77.84.Dy; 77.22.-d

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Gao, Y., Sun, J., Ma, J. et al. Improved dielectric and electrical properties of (Ba,Sr)TiO3 thin films using Pt/LaNiO3 as the top-electrode material. Appl. Phys. A 91, 541–544 (2008). https://doi.org/10.1007/s00339-008-4445-y

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  • DOI: https://doi.org/10.1007/s00339-008-4445-y

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