Skip to main content
SpringerLink
Log in

Stress, microstructure and mechanical properties of graded multilayer tetrahedral amorphous carbon films

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Tetrahedral amorphous carbon (ta-C) films deposited using a filtered cathodic vacuum arc (FCVA) system, have high intrinsic stress which limits their application as protective coatings. To reduce the film stress and to improve the adhesion, a multilayer structure is deposited at a gradient substrate negative bias from 1500 V to 80 V. This paper investigates the stress, microstructure and nano-mechanical properties of graded multilayer ta-C film on Si substrates. Compared with that of single-layer films deposited at optimised bias, the graded multilayer film has low stress without a decline in hardness and Young’s modulus. Microstructural evaluation of the multilayer film using visible Raman spectra shows that the average content of the sp3 bonds of the multilayer film remain at a high level. Nanoscratch testing illustrates favorable scratch resistance and good adhesion of the multilayer film. Scanning electron microscope (SEM) observation confirms the collapse of the film surface along the scratching trace. Finally, deposition on single crystal germanium substrates of a durable coating ∼ 1100 nm thick, and composed of three graded multilayer films is demonstrated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. Robertson, Mater. Sci. Eng. R 37, 129 (2002)

    Article  Google Scholar 

  2. R. Lossy, D.L. Pappas, R.A. Roy, J.P. Doyle, J.J. Cuomo, J. Bruley, J. Appl. Phys. 77, 4750 (1995)

    Article  ADS  Google Scholar 

  3. M. Chhowalla, Y. Yin, G.A.J. Amaratunga, D.R. Mckenzie, T. Frauenheim, Appl. Phys. Lett. 69, 2344 (1996)

    Article  ADS  Google Scholar 

  4. E. Dekempeneer, K. Van Acker, K. Vercammen, J. Meneve, D. Neerinck, S. Eufinger, W. Pappaert, M. Sercu, J. Smeets, Surf. Coat. Technol. 142–144, 669 (2001)

  5. T.A. Friedmann, J.P. Sullivan, J.A. Knapp, D.R. Tallant, D.M. Follstaedt, D.L. Medlin, P.B. Mirkarimi, Appl. Phys. Lett. 71, 3820 (1997)

    Article  ADS  Google Scholar 

  6. A.C. Ferrari, B. Kleinsorge, N.A. Morrison, A. Hart, V. Stolojan, J. Robertson, J. Appl. Phys. 85, 7191 (1999)

    Article  ADS  Google Scholar 

  7. M. Gioti, S. Logothetides, C. Charitides, Appl. Phys. Lett. 73, 184 (1998)

    Article  ADS  Google Scholar 

  8. W. Zhang, A. Tanaka, K. Wazumi, Y. Koga, B.S. Xu, Diam. Relat. Mater. 13, 2166 (2004)

    Article  Google Scholar 

  9. S. Logothetidis, M. Gioti, C. Charitides, P. Patsalas, Vacuum 53, 61 (1999)

    Article  Google Scholar 

  10. D. Sheeja, B.K. Tay, S.P. Lau, X. Shi, X. Ding, Surf. Coat. Technol. 132, 228 (2000)

    Article  Google Scholar 

  11. M. Stüber, S. Ulrich, H. Leiste, A. Kratzsch, H. Holleck, Surf. Coat. Technol. 116–119, 591 (1999)

    Google Scholar 

  12. S. Zhang, X.L. Bui, Y. Fu, D.L. Butler, H. Du, Diam. Relat. Mater. 13, 867 (2004)

    Article  Google Scholar 

  13. J. Zhu, J. Han, S. Meng, J. Wang, W. Zheng, Vacuum 72, 285 (2004)

    Article  Google Scholar 

  14. G.G. Stoney, Proc. R. Soc. London A 82, 172 (1909)

    Article  ADS  Google Scholar 

  15. C.A. Davis, Thin Solid Films 226, 30 (1993)

    Article  Google Scholar 

  16. J. Han, J. Zhu, L. Niu, J. Lu, W. Chen, Surf. Coat. Technol. 201, 5323 (2007)

    Article  Google Scholar 

  17. M.L. Tan, J.C. Han, J.Q. Zhu, S.H. Meng, W. Gao, Trans. Nonferr. Metal. Soc. 14, 238 (2004)

    Google Scholar 

  18. J. Zhu, J. Han, A. Liu, S. Meng, C. Jiang, Surf. Coat. Technol. 201, 6667 (2007)

    Article  Google Scholar 

  19. P. Patsalas, S. Logothetidis, P.C. Kelires, Diam. Relat. Mater. 14, 1241 (2005)

    Article  Google Scholar 

  20. D.R. Mckenzie, D. Muller, B.A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991)

    Article  ADS  Google Scholar 

  21. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, Phys. Rev. B 41, 10468 (1990)

    Article  ADS  Google Scholar 

  22. S. Logothetidis, M. Gioti, C. Charitides, M. Gioti, Y. Panayiotatos, M. Handrea, W. Kautek, Diam. Relat. Mater. 9, 756 (2000)

    Article  Google Scholar 

  23. E.G. Gerstner, P.B. Lukins, D.R. Mckenzie, Phys. Rev. B 54, 14504 (1996)

    Article  ADS  Google Scholar 

  24. S. Xu, B.K. Tay, H.S. Tan, L. Zhong, Y.Q. Tu, S.R.P. Silva, W.I. Milne, J. Appl. Phys. 79, 7234 (1996)

    Article  ADS  Google Scholar 

  25. A.C. Ferrari, J. Robertson, Phys. Rev. B 61, 14095 (2000)

    Article  ADS  Google Scholar 

  26. J.R. Shi, X. Shi, Z. Sun, S.P. Lau, B.K. Tay, H.S. Tan, Diam. Relat. Mater. 10, 76 (2001)

    Article  Google Scholar 

  27. H. Sakata, G. Dresselhaus, M.S. Dresselhaus, M. Endo, J. Appl. Phys. 63, 2769 (1988)

    Article  ADS  Google Scholar 

  28. J. Malzbender, J.M.J. den Toonder, A.R. Balkenende, G. de With, Mater. Sci. Eng. R 36, 47 (2002)

    Article  Google Scholar 

  29. C. Charitidis, S. Logothetidis, P. Douka, Diam. Relat. Mater. 8, 558 (1999)

    Article  Google Scholar 

  30. Z. Gan, Y. Zhang, G. Yu, C.M. Tan, S.P. Lau, B.K. Tay, J. Appl. Phys. 95, 3509 (2004)

    Article  ADS  Google Scholar 

  31. J.A. Knapp, D.M. Follstaedt, S.M. Myers, J.C. Barbour, T.A. Friedmann, J. Appl. Phys. 85, 1460 (1999)

    Article  ADS  Google Scholar 

  32. L.Y. Huang, J.W. Zhao, K.W. Xu, J. Lu, Diam. Relat. Mater. 11, 1454 (2002)

    Article  Google Scholar 

  33. J.P. Quinn, P. Lemoine, P. Maguire, J.A. Mclaughlin, Diam. Relat. Mater. 13, 1385 (2004)

    Article  Google Scholar 

  34. J. Qi, K.H. Lai, C.S. Lee, I. Bello, S.T. Lee, J.B. Luo, S.Z. Wen, Diam. Relat. Mater. 10, 1833 (2001)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Center for Composition Materials, Harbin Institute of Technology, No. 2 Yikuang Street, Nangang District, Harbin, 150080, P.R. China

    Xiao Han, Jiaqi Zhu, Jiecai Han, Manlin Tan & Wei Gao

Authors
  1. Xiao Han
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jiaqi Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jiecai Han
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Manlin Tan
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Wei Gao
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Xiao Han.

Additional information

PACS

81.05.Uw; 81.15.Jj; 68.65.Ac; 68.55.Nq; 68.60.Bs

Rights and permissions

Reprints and permissions

About this article

Cite this article

Han, X., Zhu, J., Han, J. et al. Stress, microstructure and mechanical properties of graded multilayer tetrahedral amorphous carbon films. Appl. Phys. A 91, 529–533 (2008). https://doi.org/10.1007/s00339-008-4443-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-008-4443-0

Keywords

Search

Navigation