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Femtosecond laser irradiation of metal and thermal oxide layers on silicon: studies utilising cross-sectional transmission electron microscopy

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Abstract

We present the results of 800 and 400 nm wavelength, femtosecond laser pulse irradiation of a sample consisting of a metal film on thermally-grown oxide on silicon. On selected sites, cross-sectional transmission electron microscopy was performed to provide information on sub-surface changes not observable with surface scanning electron microscopy. A range of pulse energies in single-pulse irradiation exists for which the metal film was removed but the oxide was not appreciably thinned. For a sufficiently high pulse energy within this range, substantial defects were observed in the underlying silicon. Five infrared pulses of a relatively high fluence created significant defects, as well as producing polycrystalline material on top of the original oxide and metal. We discuss various factors which may play a role in the formation of the observed features.

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Authors and Affiliations

  1. Department of Engineering Physics, McMaster University, Hamilton, Ontario, L8S 4L7, Canada

    T.H.R. Crawford, E.M. Hsu & H.K. Haugen

  2. Center for Crystal Science and Technology, University of Yamanashi, 7 Miyamae-cho, Kofu, 400-8511, Japan

    J. Yamanaka

  3. Department of Materials Science and Engineering, McMaster University, Hamilton, Ontario, L8S 4L7, Canada

    G.A. Botton

  4. Brockhouse Institute for Materials Research, McMaster University, Hamilton, Ontario, L8S 4L7, Canada

    G.A. Botton & H.K. Haugen

  5. Center for Emerging Device Technologies, McMaster University, Hamilton, Ontario, L8S 4L7, Canada

    G.A. Botton & H.K. Haugen

  6. Department of Physics and Astronomy, McMaster University, Hamilton, Ontario, L8S 4L7, Canada

    H.K. Haugen

Authors
  1. T.H.R. Crawford
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  2. J. Yamanaka
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  3. E.M. Hsu
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  4. G.A. Botton
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  5. H.K. Haugen
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Corresponding authors

Correspondence to G.A. Botton or H.K. Haugen.

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PACS

61.72.Ff; 68.37.Lp; 79.20.Ds

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Crawford, T., Yamanaka, J., Hsu, E. et al. Femtosecond laser irradiation of metal and thermal oxide layers on silicon: studies utilising cross-sectional transmission electron microscopy. Appl. Phys. A 91, 473–478 (2008). https://doi.org/10.1007/s00339-008-4433-2

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  • DOI: https://doi.org/10.1007/s00339-008-4433-2

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