Skip to main content

Ionization in vacuum ultraviolet F2 laser ablated polymer plumes

Applied Physics A volume 90, pages 403–409 (2008)Cite this article

Abstract

An experimental investigation of ion generation in the 157-nm vacuum ultraviolet (VUV) F2 laser ablation of three selected polymers – glycidyl azide polymer (GAP), a triazene polymer (TP6) and polyimide – is described. An ion collector probe is used to determine the relative ion yield and white-light interferometry of ablated surfaces to ascertain mass-removal levels. The findings indicate that ions are generated under the action of the VUV laser pulse at fluences down to at least as low as the threshold for material removal. A two-photon photoionization model is proposed that provides a good description of the results.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

USD 39.95

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

References

  1. T. Lippert, J.T. Dickenson, Chem. Rev. 103, 317 (2003)

    Article  Google Scholar 

  2. P.R. Herman, R.S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci. 154–155, 577 (2000)

    Google Scholar 

  3. P. Clarke, P.E. Dyer, P.H. Key, H.V. Snelling, Appl. Phys. A 69, S117 (1999)

    Article  ADS  Google Scholar 

  4. T. Fujii, S. Inoue, F. Kannari, J. Appl. Phys. 78, 3401 (1995)

    Article  ADS  Google Scholar 

  5. M. Kuhnke, L. Cramer, P.E. Dyer, J.T. Dickenson, T. Lippert, H. Niino, M. Pervolaraki, C.D. Walton, A. Wokaun, J. Phys.: Conf. Ser. 59, 625 (2007)

    Article  ADS  Google Scholar 

  6. D.I. Rosen, D.E. Hastings, G.M. Weyl, J. Appl. Phys. 53, 5882 (1982)

    Article  ADS  Google Scholar 

  7. H. Niino, A. Yabe, Appl. Surf. Sci. 69, 1 (1993)

    Article  Google Scholar 

  8. C.E. Otis, Appl. Phys. B 49, 455 (1989)

    Article  ADS  Google Scholar 

  9. L. Urech, T. Lippert, C.R. Phipps, A. Wokaun, Appl. Surf. Sci. 253, 6409 (2007)

    Article  ADS  Google Scholar 

  10. L. Urech, T. Lippert, in Laser Ablation and its Applications (Springer Ser. Opt. Sci. 129), ed. by C.R. Phipps (Springer, New York, 2007), pp. 281–297

  11. M. Nagel, R. Hany, D. Rentsch, M. Molberg, F. Nüesch, T. Lippert, Macromol. Chem. Phys. 208, 277 (2007)

    Article  Google Scholar 

  12. R. Srinivasan, B. Braren, R.W. Dreyfus, J. Appl. Phys. 61, 372 (1986)

    Article  ADS  Google Scholar 

  13. E.T. Arakawa, M.W. Williams, J.C. Ashley, L.R. Painter, J. Appl. Phys. 52, 3579 (1981)

    Article  ADS  Google Scholar 

  14. M. Kuhnke, L. Cramer, J.T. Dickenson, T. Lippert, A. Wokaun, TOF-MS study of photoreactive polymers ablated by F2 excimer laser (157 nm), unpublished

  15. L. Spitzer, Physics of Fully Ionized Gases, 2nd edn. (Wiley, New York, 1967)

  16. P.E. Dyer, in Photochemical Processing of Electronic Materials, ed. by I.W. Boyd, R.B. Jackman (Academic, London, 1991), Chap. 14

  17. Y.B. Zel’dovitch, Y.P. Raizer, Physics of Shock Waves and High-Temperature Phenomena, vol. I (Academic, London, 1966)

  18. N.G. Utterback, S.P. Tang, J.F. Friichtenicht, Phys. Fluids 19, 900 (1976)

    Article  ADS  Google Scholar 

  19. E.E.B. Campbell, G. Ulmer, K. Bues, I.V. Hertel, Appl. Phys. A 48, 543 (1989)

    Article  ADS  Google Scholar 

  20. W.R. Creasy, J.T. Brenna, Chem. Phys. 126, 453 (1988)

    Article  Google Scholar 

  21. M. Hauer, J.T. Dickenson, S.C. Langford, T. Lippert, A. Wokaun, Appl. Surf. Sci. 197–198, 791 (2002)

    Google Scholar 

  22. L. Urech, T. Lippert, C.R. Phipps, A. Wokaun, Proc. SPIE 6261, 6261114-1 (2006)

    Google Scholar 

  23. R.E. Walkup, J.M. Jasinski, R.W. Dreyfus, Appl. Phys. Lett. 48, 1690 (1986)

    Article  ADS  Google Scholar 

  24. S. Kuper, J. Brannon, K. Brannon, Appl. Phys. A 56, 43 (1993)

    Article  ADS  Google Scholar 

  25. R.C. Weast, M.J. Astle, Handbook of Chemistry and Physics, 62nd edn. (CRC, Boca Raton, FL, 1981)

  26. J.T. Tate, P.T. Smith, Phys. Rev. 39, 270 (1932)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, University of Hull, Hull, HU6 7RX, UK

    P.E. Dyer, M. Pervolaraki & C.D. Walton

  2. General Energy Research Department, Paul Scherrer Institut, 5232, Villigen-PSI, Switzerland

    T. Lippert, M. Kuhnke & A. Wokaun

Authors
  1. P.E. Dyer
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Pervolaraki
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C.D. Walton
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. T. Lippert
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. Kuhnke
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. Wokaun
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P.E. Dyer.

Additional information

PACS

52.38.Mf; 71.20.Rv; 52.25.Jm

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Dyer, P., Pervolaraki, M., Walton, C. et al. Ionization in vacuum ultraviolet F2 laser ablated polymer plumes. Appl. Phys. A 90, 403–409 (2008). https://doi.org/10.1007/s00339-007-4341-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-007-4341-x

Keywords

  • Polyimide
  • Material Removal
  • Vacuum Ultraviolet
  • Glycidyl Azide Polymer
  • White Light Interferometer