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Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector

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Abstract

The fabrication and frequency responses of solidly mounted resonators (SMRs) consisting of a single layer of aluminum nitride (AlN) piezoelectric thin film, and varying numbers of multi-layered titanium/molybdenum (Ti/Mo) thin films has been investigated. In order to obtain the frequency response near 2.5 GHz, specific thicknesses of AlN, Mo, and Ti were designed for the thin film deposition processes. Manufacturing parameters of thin films in the sputtering system, such as deposition power, temperature and pressure, were adjusted to obtain the optimum surface roughness of 13.9 nm for four-pair Ti/Mo. The SMR devices with various numbers of Ti/Mo pairs were investigated and the frequency responses were compared. The SMR devices showed the distinct resonant phenomenon with excellent sidelobe suppression at 2.31 GHz. The more Ti/Mo pairs, the better the frequency characteristics obtained. The experimental results revealed that the Ti/Mo Bragg reflector exhibits an excellent property to restrain acoustic dissipation caused by the substrate, and is suitable for the fabrication of SMR devices.

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Authors and Affiliations

  1. Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan, R.O.C.

    Ching-Liang Wei & Ying-Chung Chen

  2. Department of Electrical Engineering, De Lin Institute of Technology, Taipei, Taiwan, R.O.C.

    Chien-Chuan Cheng

  3. Department of Computer and Communication, SHU-TE University, Kaohsiung, Taiwan, R.O.C.

    Kuo-Sheng Kao

Authors
  1. Ching-Liang Wei
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  2. Ying-Chung Chen
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  3. Chien-Chuan Cheng
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  4. Kuo-Sheng Kao
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Correspondence to Ying-Chung Chen.

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PACS

43.20.Gp; 43.20.Ks; 77.65.Fs

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Wei, CL., Chen, YC., Cheng, CC. et al. Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector. Appl. Phys. A 90, 501–506 (2008). https://doi.org/10.1007/s00339-007-4312-2

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  • DOI: https://doi.org/10.1007/s00339-007-4312-2

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