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Nanocomposite TiN films with embedded MoS2 inorganic fullerenes produced by combining supersonic cluster beam deposition with cathodic arc reactive evaporation

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Abstract

We report the production and characterization of nanocomposite thin films consisting of a titanium nitride matrix with embedded molybdenum disulphide fullerene-like nanoparticles. This was achieved by combining a cluster source generating a pulsed supersonic beam of MoS2 clusters with an industrial cathodic arc reactive evaporation apparatus used for TiN deposition. Cluster-assembled films show the presence of MoS2 nanocages and nanostructures and the survival of such structures dispersed in the TiN matrix in the co-deposited samples. Nanotribological characterization by atomic force microscopy shows that the presence of MoS2 nanoparticles even in very low concentration modifies the behaviour of the TiN matrix.

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Authors and Affiliations

  1. Dipartimento di Fisica and CIMAINA, Universitá di Milano, via Celoria 16, 20133, Milano, Italy

    C. Piazzoni, M. Blomqvist, A. Podestà, G. Bardizza, M. Bonati, P. Piseri & P. Milani

  2. IonBond Ltd., No 1 Industrial Estate, Consett, DL132PJ, UK

    C. Davies & P. Hatto

  3. Department of Material Science and Metallurgy, University of Cambridge, Cambridge, CB23QZ, UK

    C. Ducati

  4. Research Institute for Technical Physics and Materials Science, Konkoly-Thege M. út 29–33, 1121, Budapest, Hungary

    K. Sedláčková & G. Radnóczi

Authors
  1. C. Piazzoni
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  2. M. Blomqvist
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  3. A. Podestà
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  4. G. Bardizza
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  5. M. Bonati
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  6. P. Piseri
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  7. P. Milani
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  8. C. Davies
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  9. P. Hatto
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  10. C. Ducati
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  11. K. Sedláčková
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  12. G. Radnóczi
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Corresponding author

Correspondence to P. Milani.

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PACS

62.20.Qp; 62.23.Pq; 68.55.-a; 81.07.-b

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Piazzoni, C., Blomqvist, M., Podestà, A. et al. Nanocomposite TiN films with embedded MoS2 inorganic fullerenes produced by combining supersonic cluster beam deposition with cathodic arc reactive evaporation. Appl. Phys. A 90, 101–104 (2008). https://doi.org/10.1007/s00339-007-4292-2

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  • DOI: https://doi.org/10.1007/s00339-007-4292-2

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