Advertisement

Applied Physics A

, Volume 89, Issue 4, pp 1001–1003 | Cite as

Ripple formation during deep hole drilling in copper with ultrashort laser pulses

  • A. WeckEmail author
  • T.H.R. Crawford
  • D.S. Wilkinson
  • H.K. Haugen
  • J.S. Preston
Article

Abstract

Cross sections of deep holes produced by ultrashort laser pulses and showing a variety of microstructural formations are presented. After tens of thousands of 800 nm wavelength pulses, the walls of the holes show distinct ripples with a period of ∼300 nm. It is demonstrated that these ripples are the result of light interference effects. Indeed, the ripples are perpendicular to the electric field of the laser beam and their spacing scales with the laser wavelength. Additional fine ripples with spacing of ∼75 nm were also observed.

Keywords

Pulse Length Ultrashort Laser Pulse Scanning Electron Micro Image Deep Hole Drilling Ripple Formation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    D. Bäuerle, Laser Processing and Chemistry, 3rd edn. (Springer, Berlin, 2000)Google Scholar
  2. 2.
    A. Luft, U. Franz, A. Emsermann, J. Kaspar, Appl. Phys. A 63, 93 (1996)ADSGoogle Scholar
  3. 3.
    D. Gómez, I. Goenaga, I. Lizuain, M. Ozaita, Opt. Eng. 44, 051105 (2005)CrossRefADSGoogle Scholar
  4. 4.
    M. Farsari, G. Filippidis, S. Zoppel, G.A. Reider, C. Fotakis, J. Micromech. Microeng. 15, 1786 (2005)CrossRefADSGoogle Scholar
  5. 5.
    M. Groenendijk, J. Meijer, Microstructuring using femtosecond pulsed laser ablation Proceedings of ICALEO 2005, Paper M408 (2005)Google Scholar
  6. 6.
    D.C. Emmony, R.P. Howson, L.J. Willis, Appl. Phys. Lett. 23, 598 (1973)CrossRefADSGoogle Scholar
  7. 7.
    N. Tsukada, S. Sugata, Y. Mita, Appl. Phys. Lett. 42, 424 (1983)CrossRefADSGoogle Scholar
  8. 8.
    G.S. Zhou, P.M. Fauchet, A.E. Siegman, Phys. Rev. B 26, 5366 (1982)CrossRefADSGoogle Scholar
  9. 9.
    J.F. Young, J.S. Preston, H.M. van Driel, J.E. Sipe, Phys. Rev. B 27, 1155 (1983)CrossRefADSGoogle Scholar
  10. 10.
    N.R. Isenor, Appl. Phys. Lett. 31, 148 (1977)CrossRefADSGoogle Scholar
  11. 11.
    Y. Jee, M.F. Becker, R.M. Walser, J. Opt. Soc. Am. B 5, 648 (1988)ADSCrossRefGoogle Scholar
  12. 12.
    P. Rudolph, W. Kautek, Thin Solid Films 453454, 537 (2004)Google Scholar
  13. 13.
    G. Dumitru, V. Romano, H.P. Weber, M. Sentis, W. Marine, Appl. Phys. A 74, 729 (2002)CrossRefADSGoogle Scholar
  14. 14.
    J. Bonse, S. Baudach, J. Krueger, W. Kautek, M. Lenzner, Appl. Phys. A 74, 19 (2002)CrossRefADSGoogle Scholar
  15. 15.
    J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)CrossRefADSGoogle Scholar
  16. 16.
    A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)CrossRefADSGoogle Scholar
  17. 17.
    N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 81, 933 (2005)CrossRefADSGoogle Scholar
  18. 18.
    T.H.R. Crawford, H.K. Haugen, Appl. Surf. Sci. 253, 4970 (2006)CrossRefADSGoogle Scholar
  19. 19.
    J.E. Sipe, J.F. Young, J.S. Preston, H.M. van Driel, Phys. Rev. B 27, 1141 (1983)CrossRefADSGoogle Scholar
  20. 20.
    S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997)ADSCrossRefGoogle Scholar
  21. 21.
    B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tünnermann, Appl. Phys. A 63, 109 (1996)ADSGoogle Scholar
  22. 22.
    A.E. Wynne, B.C. Stuart, Appl. Phys. A 76, 373 (2003)CrossRefADSGoogle Scholar
  23. 23.
    A. Borowiec, H.K. Haugen, Appl. Phys. A 79, 521 (2004)CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • A. Weck
    • 1
    Email author
  • T.H.R. Crawford
    • 2
  • D.S. Wilkinson
    • 1
  • H.K. Haugen
    • 2
    • 3
  • J.S. Preston
    • 2
  1. 1.Department of Materials Science and EngineeringMcMaster UniversityHamiltonCanada
  2. 2.Department of Engineering PhysicsMcMaster UniversityHamiltonCanada
  3. 3.Department of Physics and AstronomyMcMaster UniversityHamiltonCanada

Personalised recommendations