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Effect of salt precursor on laser-assisted copper deposition

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Abstract

Continuous copper structures were precipitated on microscope cover glasses by the laser-induced chemical liquid phase deposition (LCLD) method. The deposition of copper was realized from both CuSO4- and CuCl2-based electrolyte solutions. The surface morphology and the chemical composition of the deposits were analyzed with a scanning electron microscope and energy dispersive X-ray spectrometer (EDX). The dependence of the characteristics (width and resistance) of the copper deposits on the laser power, temperature and the salt precursor was examined. The observed strong influence of the solution temperature and the salt precursor on the deposits characteristics was explained by the specific chemical features of the Cu(II)→Cu(0) reduction process.

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Authors and Affiliations

  1. Laser Research Institute, St. Petersburg State University, Ulianovskaya 5, Petrodvorets, 198504, St. Petersburg, Russia

    A.A. Manshina, A.V. Povolotskiy, T.Y. Ivanova & Y.S. Tver’yanovich

  2. Department of Chemistry, St. Petersburg State University, Universitetskiy prosp. 26, Petrodvorets, 198504, St. Petersburg, Russia

    S.P. Tunik

  3. Korea Institute of Machinery and Materials, Sangnam-Dong 66, Changwon, Kyungnam, Republic of Korea

    D. Kim, M. Kim & S.C. Kwon

Authors
  1. A.A. Manshina
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  2. A.V. Povolotskiy
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  3. T.Y. Ivanova
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  4. Y.S. Tver’yanovich
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  5. S.P. Tunik
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  6. D. Kim
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  7. M. Kim
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  8. S.C. Kwon
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Correspondence to A.A. Manshina.

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PACS

42.62.-b

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Manshina, A., Povolotskiy, A., Ivanova, T. et al. Effect of salt precursor on laser-assisted copper deposition. Appl. Phys. A 89, 755–759 (2007). https://doi.org/10.1007/s00339-007-4164-9

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  • DOI: https://doi.org/10.1007/s00339-007-4164-9

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