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Formation of metal nanoparticles in silica by the sequential implantation of Ag and Cu

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Abstract

Spherical-like nanoparticles have been formed by sequentially ion-implanting Ag/Cu into silica glasses. During sequential Ag/Cu ion implantation, the diameter of Cu nanoparticles is increased and the average Ag nanoparticle diameter is decreased with increasing Cu ion dose. The evolution of nanoparticles is characterized by grazing incidence X-ray diffraction, extended X-ray absorption fine structure spectroscopy and transmission electron microscopy. Nanovoids in the nanoparticles are formed by sequential ion implantation.

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Correspondence to C.Z. Jiang.

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61.72.Ww; 61.46.-W

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Xiao, X., Guo, L., Ren, F. et al. Formation of metal nanoparticles in silica by the sequential implantation of Ag and Cu. Appl. Phys. A 89, 681–684 (2007). https://doi.org/10.1007/s00339-007-4146-y

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  • DOI: https://doi.org/10.1007/s00339-007-4146-y

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