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C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

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Abstract

The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp3 bonding configurations.

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Authors and Affiliations

  1. Center for Composite Materials, Harbin Institute of Technology, Post-Box 3010, Yikuang Street 2, Harbin, 150080, P.R. China

    J. Zhu, C. Jiang, J. Han & J. Liang

Authors
  1. J. Zhu
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  2. C. Jiang
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  3. J. Han
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  4. J. Liang
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Correspondence to J. Zhu.

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PACS

68.49.Uv; 79.60.-i; 61.43.Dq; 65.90.+i

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Zhu, J., Jiang, C., Han, J. et al. C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films. Appl. Phys. A 89, 497–501 (2007). https://doi.org/10.1007/s00339-007-4094-6

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  • DOI: https://doi.org/10.1007/s00339-007-4094-6

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