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Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser

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Abstract

Using the fourth harmonic of a Q-switched Nd:YAG laser, the formation of a trepanned through hole of 1 mm in diameter in borosilicate glass of 140 μm thickness was achieved. The number of circular scans required to form a trepanned through hole, decreased rapidly with an increase in the number of the lines (circles) per circular scan. This result is interpreted as a decrease of beam propagation losses in the groove with an increase in the groove width. The number of irradiation pulses required to form a trepanned through hole increased rapidly with an increase in the number of lines (circles) per circular scan. The optimum condition for forming a trepanned through hole arises from the relationship between the irradiation pulse energy density, the number of irradiation pulses, and the number of lines (circles) per scan.

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Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba East, Namiki 1-2-1, Tsukuba, Ibaraki, 305-8564, Japan

    Y. Matsuoka

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  1. Y. Matsuoka
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Correspondence to Y. Matsuoka.

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PACS

52.38.Mf; 42.70.Ce; 42.62.Cf

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Matsuoka, Y. Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser. Appl. Phys. A 88, 319–322 (2007). https://doi.org/10.1007/s00339-007-3929-5

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  • DOI: https://doi.org/10.1007/s00339-007-3929-5

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