Skip to main content
SpringerLink
Log in

Fabrication of microstructures on paraffin substrate using laser heating

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

In this paper, a technique of forming convex microstructures on a paraffin substrate using laser heating is described. This technique makes use of a phenomenon that solid paraffin, melted by continuous laser irradiation, grows into a pillar-shaped structure with a high aspect ratio in a liquid. Two-dimensional structures, such as line- and wall-shaped structures, are available by scanning irradiation. Also, it is possible to fabricate oblique structures with an inclined laser irradiation. In addition, some characteristics of this fabrication method, such as the laser power and the material temperature, are investigated. Furthermore, the mechanism of this fabrication method is presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. E.F. Reznikova, J. Mohr, H. Hein, Microsyst. Technol. 11, 282 (2005)

    Article  Google Scholar 

  2. H. Lorenz, M. Despont, P. Vettiger, P. Renaud, Microsyst. Technol. 4, 143 (1998)

    Article  Google Scholar 

  3. J.K. Chang, H. Bang, S.J. Park, S. Chung, C. Chung, D.C. Han, Microsyst. Technol. 9, 555 (2003)

    Article  Google Scholar 

  4. S. Jeong, S. Han, J. Selvan, Proc. SPIE 5063, 44 (2003)

    ADS  Google Scholar 

  5. F. Korte, J. Koch, J. Serbin, A. Ovsianikov, B.N. Chichkov, IEEE Trans. Nanotechnol. 3, 468 (2004)

    Article  Google Scholar 

  6. T.W. Lim, S.H. Park, D.Y. Yang, H.J. Kong, K.S. Lee, Appl. Phys. A 84, 379 (2006)

    Article  ADS  Google Scholar 

  7. F. Beinhorn, J. Ihlemann, K. Luther, J. Troe, Appl. Phys. A 68, 709 (1999)

    Article  ADS  Google Scholar 

  8. J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, B.N. Chichkov, Appl. Phys. A 81, 325 (2005)

    Article  ADS  Google Scholar 

  9. F. Korte, J. Koch, B.N. Chichkov, Appl. Phys. A 79, 879 (2004)

    Article  ADS  Google Scholar 

  10. N. Tsukada, T. Nakao, T. Higuchi, in 18th IEEE Int. Conf. Micro Electro Mechanical Systems, 2005, p. 576

  11. D. Bauerle, in Laser Processing and Chemistry (Springer, Berlin Heidelberg, 2000), p. 178

Download references

Author information

Authors and Affiliations

  1. Department of Precision Engineering, The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

    C.-A. Lee, N. Tsukada, T. Nakao & T. Higuchi

Authors
  1. C.-A. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. N. Tsukada
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. Nakao
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. T. Higuchi
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to C.-A. Lee.

Additional information

PACS

07.10.Cm; 47.55.Pf; 65.40.De; 79.20.Ds; 81.05.-t

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, CA., Tsukada, N., Nakao, T. et al. Fabrication of microstructures on paraffin substrate using laser heating. Appl. Phys. A 86, 201–206 (2007). https://doi.org/10.1007/s00339-006-3756-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-006-3756-0

Keywords

Search

Navigation