Skip to main content
SpringerLink
Log in

Vertical nanopatterning of 6H-SiC(0001) surfaces using gold-metal nanotube membrane lithography

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Large-area membranes consisting of arrays of gold metal nanotubes were used as shadow masks to generate vertical nanopatterned 6H-SiC(0001) substrates. The gold membranes are formed by a replication technique based on electrochemical deposition of anodic aluminium oxide membranes or silicon substrates containing lithographically generated etch pits. Using the gold metal membranes as masks in reactive ion etching, spatially well-resolved protrusions in the SiC substrate were etched, arranged in periodic and non-periodic two-dimensional arrays. Final vertical morphological reorganizations were obtained in a hot-wall reactor under hydrogen flow. The obtained large-area networks of nano-objects have many potential applications in magnetism, electronics and biology.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J.S. Lee, N.-H. Cho, Appl. Surf. Sci. 190, 171 (2002)

    Article  ADS  Google Scholar 

  2. J.C. Hulteen, C.R. Martin, J. Mater. Chem. 7, 1075 (1997)

    Article  Google Scholar 

  3. G. Sauer, G. Brehm, S. Schneider, K. Nielsch, R.B. Wehrspohn, J. Choi, H. Hofmeister, U. Gösele, J. Appl. Phys. 91, 3243 (2002)

    Article  ADS  Google Scholar 

  4. I.M. Tiginyanu, C. Schwab, J.-J. Grob, B. Prévot, H.L. Hartnagel, A. Vogt, G. Irmer, J. Monecke, Appl. Phys. Lett. 71, 3829 (1997)

    Article  ADS  Google Scholar 

  5. A.J. Rosenbloom, D.M. Sipe, Y. Shishkin, Y. Ke, R.P. Devaty, W.J. Choyke, Biomed. Microdev. 6, 261 (2004)

    Article  Google Scholar 

  6. T. Matsumoto, J. Takahashi, T. Tamaki, T. Futagi, H. Mimura, Y. Kanemitsu, Appl. Phys. Lett. 64, 226 (1994)

    Article  ADS  Google Scholar 

  7. H. Mimura, T. Matsumoto, Y. Kanemitsu, Appl. Phys. Lett. 64, 3350 (1994)

    Article  ADS  Google Scholar 

  8. A. Sagar, C.D. Lee, R.M. Feenstra, C.K. Inoki, T.S. Kuan, J. Appl. Phys. 92, 4070 (2002)

    Article  ADS  Google Scholar 

  9. Y. Shishkin, Y. Ke, R.P. Devaty, W.J. Choyke, J. Appl. Phys. 97, 044908 (2005)

    Article  ADS  Google Scholar 

  10. W. Wulfhekel, D. Sander, S. Nitsche, A. Leycuras, M. Hanbücken, Appl. Phys. A 79, 411 (2004)

    Article  ADS  Google Scholar 

  11. D. Sander, W. Wulfhekel, M. Hanbücken, S. Nitsche, J.-P. Palmari, F. Dulot, F. Arnaud d’Avitaya, A. Leycuras, Appl. Phys. Lett. 81, 3579 (2002)

    Article  ADS  Google Scholar 

  12. S. Matthias, F. Müller, C. Jamois, R.B. Wehrspohn, U. Gösele, Adv. Mater. 16, 2166 (2004)

    Article  Google Scholar 

  13. V. Lehmann, H. Föll, J. Electrochem. Soc. 137, 653 (1990)

    Article  Google Scholar 

  14. V. Lehmann, J. Electrochem. Soc. 140, 2836 (1993)

    Article  Google Scholar 

  15. K. Nielsch, J. Choi, K. Schwirn, R.B. Wehrspohn, U. Gösele, Nano Lett. 2, 677 (2002)

    Article  ADS  Google Scholar 

  16. SiCrystal AG, Erlangen, Germany, www.sicrystal.de

  17. W. Lee, M. Alexe, K. Nielsch, U. Gösele, Chem. Mater. 17, 3325 (2005)

    Article  Google Scholar 

  18. J. Choi, K. Nielsch, M. Reiche, R.B. Wehrspohn, U. Gösele, J. Vac. Sci. Technol. B 21, 763 (2003)

    Article  Google Scholar 

  19. A. Leycuras, Mater. Sci. Forum 338–342, 241 (2000)

    Article  Google Scholar 

  20. W. Wulfhekel, D. Sander, S. Nitsche, F. Dulot, A. Leycuras, M. Hanbücken, Surf. Sci. 550, 8 (2004)

    Article  ADS  Google Scholar 

  21. V. Ramachandran, M.F. Brady, A.R. Smith, R.M. Feenstra, J. Electron. Mater. 27, 308 (1998)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany

    W. Lee, W. Wulfhekel, K. Nielsch & U. Gösele

  2. CRMCN-CNRS, Campus de Luminy, Case 913, 13288, Marseille, France

    E. Moyen & M. Hanbücken

  3. CRHEA-CNRS, Rue Bernard Gregory, Sophia-Antipolis, 06560, Valbonne, France

    A. Leycuras

Authors
  1. W. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. Moyen
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. W. Wulfhekel
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Leycuras
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. K. Nielsch
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. U. Gösele
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. M. Hanbücken
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Hanbücken.

Additional information

PACS

61.46.+w; 68.37.-d; 81.65.Cf

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, W., Moyen, E., Wulfhekel, W. et al. Vertical nanopatterning of 6H-SiC(0001) surfaces using gold-metal nanotube membrane lithography. Appl. Phys. A 83, 361–363 (2006). https://doi.org/10.1007/s00339-006-3566-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-006-3566-4

Keywords

Search

Navigation